Saurabh Ullal | Researchain

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Featured researches published by Saurabh Ullal.

Archive | 2004

In-situ cleaning of a polymer coated plasma processing chamber

Harmeet Singh; John Daugherty; Vahid Vahedi; Saurabh Ullal

Archive | 2006

Upper electrode backing member with particle reducing features

Anthony de la Llera; Allan Ronne; Jaehyun Kim; Jason Augustino; Rajinder Dhindsa; Yen-Kun Victor Wang; Saurabh Ullal; Anthony J. Norell; Keith Comendant; William M. Denty

Archive | 2004

Method to improve profile control and N/P loading in dual doped gate applications

Helene Del Puppo; Frank Y. Lin; Chris Lee; Vahid Vahedi; Thomas A. Kamp; Alan J. Miller; Saurabh Ullal; Harmeet Singh

Archive | 2007

In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control

Harmeet Singh; Saurabh Ullal; Shibu Gangadharan

Archive | 2011

Plasma confinement ring assembly for plasma processing chambers

Anthony de la Llera; David Carman; Travis R. Taylor; Saurabh Ullal; Harmeet Singh

Archive | 2006

Showerhead electrode assembly with gas flow modification for extended electrode life

Jason Augustino; Anthony de la Llera; Allan Ronne; Jaehyun Kim; Rajinder Dhindsa; Yen-Kun Victor Wang; Saurabh Ullal; Anthony J. Norell; Keith Comendant; William M. Denty

Archive | 2006