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Katrina Mikhaylichenko

Lam Research

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Publication

Featured researches published by Katrina Mikhaylichenko.

Archive | 2002

Substrate cleaning brush preparation sequence, method, and system

Katrina Mikhaylichenko; Michael Ravkin

Archive | 2003

Brush scrubbing-high frequency resonating wafer processing system and methods for making and implementing the same

Katrina Mikhaylichenko; Fritz C. Redeker

Archive | 2002

Drying a substrate using a combination of substrate processing technologies

Michael Ravkin; Katrina Mikhaylichenko; John M. Delarios

Archive | 2006

Method for removing contamination from a substrate and for making a cleaning solution

Erik M. Freer; John M. de Larios; Katrina Mikhaylichenko; Michael Ravkin; Mikhail Korolik; Fred C. Redeker

Archive | 2006

Cleaning compound and method and system for using the cleaning compound

Erik M. Freer; John M. de Larios; Katrina Mikhaylichenko; Michael Ravkin; Mikhail Korolik; Fred C. Redeker

Archive | 2006

Method and apparatus for cleaning a semiconductor substrate

Erik M. Freer; John M. Delarios; Katrina Mikhaylichenko; Michael Ravkin; Mikhail Korolik; Fred C. Redeker

Archive | 2004

Proximity head heating method and apparatus

Katrina Mikhaylichenko; John M. Delarios

Archive | 2006

Method and system for using a two-phases substrate cleaning compound

Mikhail Korolik; Erik M. Freer; John M. de Larios; Katrina Mikhaylichenko; Mike Ravkin; Fritz C. Redeker

Archive | 2005

System and method for a combined contact and non-contact wafer cleaning module

Katrina Mikhaylichenko; Michael Ravkin; John M. Delarios

Archive | 2010

Apparatus for Contained Chemical Surface Treatment

Katrina Mikhaylichenko; Mike Ravkin; Fritz C. Redeker; John M. de Larios; Erik M. Freer; Mikhail Korolik

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Collaboration

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Michael Ravkin

Lam Research

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Mikhail Korolik

Lam Research

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Erik M. Freer

Lam Research

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John M. de Larios

Lam Research

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Fred C. Redeker

Applied Materials

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Fritz C. Redeker

Lam Research

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John M. Delarios

Lam Research

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Mike Ravkin

Lam Research

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Larios John M. De

Lam Research

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Clint Thomas

Lam Research

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