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Anwar Husain

Lam Research

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Publication

Featured researches published by Anwar Husain.

Archive | 1996

Multilayered electrostatic chuck and method of manufacture thereof

Anwar Husain

Archive | 1995

Controlling the temperature of a wafer by varying the pressure of gas between the underside of the wafer and the chuck

Anwar Husain; Hamid Noorbakhsh

Archive | 2005

Apparatus for an optimized plasma chamber grounded electrode assembly

Arnold Kholodenko; Anwar Husain

Archive | 1997

Method of in-situ cleaning of a chuck within a plasma chamber

Dean R. Denison; William Harshbarger; Anwar Husain; C. Robert Koemtzopoulos; Felix Kozakevich; David Trussell

Archive | 2009

Generator for foam to clean substrate

Arnold Kholodenko; Anwar Husain; Gregory A. Tomasch; Cheng-Yu (Sean) Lin

Archive | 2010

Wafer carrier drive apparatus and method for operating the same

Arnold Kholodenko; Anwar Husain; George Khait

Archive | 2008

Confinement of Foam Delivered by a Proximity Head

Arnold Kholodenko; Cheng-Yu Sean Lin; Leon Ginzburg; Mark Mandelboym; Gregory A. Tomasch; Anwar Husain

Archive | 2008

SINGLE SUBSTRATE PROCESSING HEAD FOR PARTICLE REMOVAL USING LOW VISCOSITY FLUID

Arnold Kholodenko; Cheng-Yu (Sean) Lin; Leon Ginzburg; Mark Mandelboym; Gregory A. Tomasch; Anwar Husain

Archive | 2014

Methods for Confinement of Foam Delivered by a Proximity Head

Arnold Kholodenko; Cheng-Yu (Sean) Lin; Leon Ginzburg; Mark Mandelboym; Greg Tomasch; Anwar Husain

Archive | 2012

Method for using generator for foam to clean substrate

Arnold Kholodenko; Anwar Husain; Gregory A. Tomasch; Cheng-Yu (Sean) Lin

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Arnold Kholodenko

Lam Research

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Cheng-Yu (Sean) Lin

Lam Research

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Gregory A. Tomasch

Lam Research

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Leon Ginzburg

Lam Research

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Mark Mandelboym

Lam Research

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Hamid Noorbakhsh

Lam Research

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C. Robert Koemtzopoulos

Lam Research

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Cheng-Yu Sean Lin

Lam Research

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David Trussell

Lam Research

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Dean R. Denison

Lam Research

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