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Cheng-Yu (Sean) Lin

Lam Research

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Publication

Featured researches published by Cheng-Yu (Sean) Lin.

Archive | 2009

Generator for foam to clean substrate

Arnold Kholodenko; Anwar Husain; Gregory A. Tomasch; Cheng-Yu (Sean) Lin

Archive | 2012

Multi-stage substrate cleaning method and apparatus

Arnold Kholodenko; Katrina Mikhaylichenko; Cheng-Yu (Sean) Lin; Mark Wilcoxson; Leon Ginzburg; Mark Kawaguchi

Archive | 2010

Apparatus and system for cleaning substrate

Cheng-Yu (Sean) Lin; Mark Kawaguchi; Mark Wilcoxson; Russell Martin; Leon Ginzburg

Archive | 2007

System, method and apparatus for maintaining separation of liquids in a controlled meniscus

Robert J. O'Donnell; Cheng-Yu (Sean) Lin; Arnold Kholodenko

Archive | 2008

METHODS OF CONFIGURING A PROXIMITY HEAD THAT PROVIDES UNIFORM FLUID FLOW RELATIVE TO A WAFER

Arnold Kholodenko; Cheng-Yu (Sean) Lin

Archive | 2009

APPARATUS FOR SUBSTANTIALLY UNIFORM FLUID FLOW RATES RELATIVE TO A PROXIMITY HEAD IN PROCESSING OF A WAFER SURFACE BY A MENISCUS

Arnold Kholodenko; Cheng-Yu (Sean) Lin; Russell Martin

Archive | 2008

SINGLE SUBSTRATE PROCESSING HEAD FOR PARTICLE REMOVAL USING LOW VISCOSITY FLUID

Arnold Kholodenko; Cheng-Yu (Sean) Lin; Leon Ginzburg; Mark Mandelboym; Gregory A. Tomasch; Anwar Husain

Archive | 2012

Proximity Head Having a Fluid Resistor

Arnold Kholodenko; Cheng-Yu (Sean) Lin; Russell Martin

Archive | 2014

Method for substrate cleaning including movement of substrate below substrate cleaning module

Cheng-Yu (Sean) Lin; Mark Kawaguchi; Mark Wilcoxson; Russell Martin; Leon Ginzburg

Archive | 2014

Methods for Confinement of Foam Delivered by a Proximity Head

Arnold Kholodenko; Cheng-Yu (Sean) Lin; Leon Ginzburg; Mark Mandelboym; Greg Tomasch; Anwar Husain

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Collaboration

Dive into the Cheng-Yu (Sean) Lin's collaboration.

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Arnold Kholodenko

Lam Research

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Leon Ginzburg

Lam Research

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Anwar Husain

Lam Research

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Gregory A. Tomasch

Lam Research

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Mark Kawaguchi

Lam Research

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Mark Wilcoxson

Lam Research

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Russell Martin

Lam Research

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Katrina Mikhaylichenko

Lam Research

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Mark Mandelboym

Lam Research

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Greg Tomasch

Lam Research

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