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Dive into the research topics where Balasubramanian Pranatharthiharan is active.

Publication


Featured researches published by Balasubramanian Pranatharthiharan.


Archive | 2009

Method for forming self-aligned metal silicide contacts

Sunfei Fang; Randolph F. Knarr; Mahadevaiyer Krishnan; Christian Lavoie; Renee T. Mo; Balasubramanian Pranatharthiharan; Jay W. Strane


Archive | 2014

METHODS OF FORMING SEMICONDUCTOR DEVICES WITH SELF-ALIGNED CONTACTS AND THE RESULTING DEVICES

Ruilong Xie; Ponoth Shom; Xiuyu Cai; Balasubramanian Pranatharthiharan; Robert J. Miller


Archive | 2005

Method and composition for electro-chemical-mechanical polishing

Panayotis C. Andricacos; Donald F. Canaperi; Emanuel I. Cooper; John M. Cotte; Hariklia Deligianni; Laertis Economikos; Daniel C. Edelstein; Silvia Franz; Balasubramanian Pranatharthiharan; Mahadevaiyer Krishnan; Andrew P. Mansson; Erick G. Walton; Alan C. West; Caliopi Andricacos


Archive | 2014

Methods of forming a semiconductor device with a protected gate cap layer and the resulting device

Daniel Pham; Xiuyu Cai; Balasubramanian Pranatharthiharan; Pranita Kulkarni


Archive | 2015

Integrated multiple gate length semiconductor device including self-aligned contacts

Su Chen Fan; Balasubramanian Pranatharthiharan; Rajasekhar Venigalla


Archive | 2013

METHODS OF FORMING FINFET SEMICONDUCTOR DEVICES WITH SELF-ALIGNED CONTACT ELEMENTS USING A REPLACEMENT GATE PROCESS AND THE RESULTING DEVICES

Ruilong Xie; Shom Ponoth; Balasubramanian Pranatharthiharan


Archive | 2013

Preventing shorting of adjacent devices

Josephine B. Chang; Michael A. Guillorn; Balasubramanian Pranatharthiharan; Jeffrey W. Sleight


Archive | 2013

Contact formation for ultra-scaled devices

Ruilong Xie; Shom Ponoth; David V. Horak; Balasubramanian Pranatharthiharan


Archive | 2016

SEMICONDUCTOR STRUCTURE CONTAINING LOW-RESISTANCE SOURCE AND DRAIN CONTACTS

Injo Ok; Balasubramanian Pranatharthiharan; Charan V. Surisetty


Archive | 2015

Method of forming contact useful in replacement metal gate processing and related semiconductor structure

Balasubramanian Pranatharthiharan; Injo Ok; Charan V. Surisetty

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