Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Bogdan Swedek is active.

Publication


Featured researches published by Bogdan Swedek.


Archive | 2006

Apparatus and methods for spectrum based monitoring of chemical mechanical polishing

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek; Harry Q. Lee; Lakshmanan Karuppiah


Archive | 2007

Polishing pad assembly with glass or crystalline window

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek


Archive | 2005

Sealed polishing pad, system and methods

Bogdan Swedek; David J. Lischka; Jeffrey Drue David; Dominic J. Benvegnu


china semiconductor technology international conference | 2012

CMP Process Control for Advanced CMOS Device Integration

Sidney P. Huey; Balaji Chandrasekaran; Doyle E. Bennett; Stan D. Tsai; Kun Xu; Jun Qian; Siva Dhandapani; Jeff David; Bogdan Swedek; Lakshmanan Karuppiah


Archive | 2006

System with sealed polishing pad

Bogdan Swedek; David J. Lischka; Jeffrey Drue David; Dominic J. Benvegnu


Meeting Abstracts | 2010

High K Metal Gate Aluminum CMP Challenges and Solutions

Kun Xu; Yufei Chen; Hassan G. Iravani; Yuchun Wang; Bogdan Swedek; May Yu; You Wang; Wen-Chiang Tu; Sherry Xia; Lakshmanan Karuppiah


Archive | 2006

Sealed polishing pad methods

Bogdan Swedek; David J. Lischka; Jeffrey Drue David; Dominic J. Benvegnu


Archive | 2007

Optical head for chemical mechanical polishing

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek


Archive | 2009

REMOVABLE OPTICAL MONITORING SYSTEM FOR CHEMICAL MECHANICAL POLISHING

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek


ECS Journal of Solid State Science and Technology | 2016

Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten

Kun Xu; Shih-Haur Shen; Jason Garcheung Fung; Hassan G. Iravani; Ingemar Carlsson; Tzu-Yu Liu; Bogdan Swedek; Shou-sung Chang; Wen-chiang Tu; Tomohiko Kitajima; Katrina Mikhaylich; Brian J. Brown; Sidney P. Huey; Fritz Redeker

Collaboration


Dive into the Bogdan Swedek's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge