Bogdan Swedek | Researchain

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Publication

Featured researches published by Bogdan Swedek.

Archive | 2006

Apparatus and methods for spectrum based monitoring of chemical mechanical polishing

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek; Harry Q. Lee; Lakshmanan Karuppiah

Archive | 2007

Polishing pad assembly with glass or crystalline window

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek

Archive | 2005

Sealed polishing pad, system and methods

Bogdan Swedek; David J. Lischka; Jeffrey Drue David; Dominic J. Benvegnu

china semiconductor technology international conference | 2012

CMP Process Control for Advanced CMOS Device Integration

Sidney P. Huey; Balaji Chandrasekaran; Doyle E. Bennett; Stan D. Tsai; Kun Xu; Jun Qian; Siva Dhandapani; Jeff David; Bogdan Swedek; Lakshmanan Karuppiah

Archive | 2006

System with sealed polishing pad

Bogdan Swedek; David J. Lischka; Jeffrey Drue David; Dominic J. Benvegnu

Meeting Abstracts | 2010

High K Metal Gate Aluminum CMP Challenges and Solutions

Kun Xu; Yufei Chen; Hassan G. Iravani; Yuchun Wang; Bogdan Swedek; May Yu; You Wang; Wen-Chiang Tu; Sherry Xia; Lakshmanan Karuppiah

Archive | 2006

Sealed polishing pad methods

Bogdan Swedek; David J. Lischka; Jeffrey Drue David; Dominic J. Benvegnu

Archive | 2007

Optical head for chemical mechanical polishing

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek

Archive | 2009

REMOVABLE OPTICAL MONITORING SYSTEM FOR CHEMICAL MECHANICAL POLISHING

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek

ECS Journal of Solid State Science and Technology | 2016

Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten

Kun Xu; Shih-Haur Shen; Jason Garcheung Fung; Hassan G. Iravani; Ingemar Carlsson; Tzu-Yu Liu; Bogdan Swedek; Shou-sung Chang; Wen-chiang Tu; Tomohiko Kitajima; Katrina Mikhaylich; Brian J. Brown; Sidney P. Huey; Fritz Redeker

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