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Dominic J. Benvegnu

Applied Materials

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Publication

Featured researches published by Dominic J. Benvegnu.

Archive | 2005

Spectrum based endpointing for chemical mechanical polishing

Dominic J. Benvegnu; Jeffrey Drue David; Boguslaw A. Swedek

Archive | 2007

Substrate thickness measuring during polishing

Jeffrey Drue David; Dominic J. Benvegnu; Harry Q. Lee; Boguslaw A. Swedek; Lakshmanan Karuppiah

Archive | 2008

Using spectra to determine polishing endpoints

Harry Q. Lee; Boguslaw A. Swedek; Dominic J. Benvegnu; Jeffrey Drue David

Archive | 2010

Spectrographic monitoring of a substrate during processing using index values

Jeffrey Drue David; Dominic J. Benvegnu; Harry Q. Lee; Boguslaw A. Swedek; Lakshmanan Karuppiah

Archive | 2006

Apparatus and methods for spectrum based monitoring of chemical mechanical polishing

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek; Harry Q. Lee; Lakshmanan Karuppiah

Archive | 2011

Adaptively Tracking Spectrum Features For Endpoint Detection

Jeffrey Drue David; Dominic J. Benvegnu; Boguslaw A. Swedek; Harry Q. Lee

Archive | 2009

Adjusting Polishing Rates by Using Spectrographic Monitoring of a Substrate During Processing

Jeffrey Drue David; Dominic J. Benvegnu; Harry Q. Lee; Boguslaw A. Swedek

Archive | 2008

Determining Physical Property of Substrate

Abraham Ravid; Boguslaw A. Swedek; Jeffrey Drue David; Jun Qian; Ingemar Carlsson; Dominic J. Benvegnu; Harry Q. Lee; Lakshmanan Karuppiah

Archive | 2007

Polishing pad assembly with glass or crystalline window

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek

Archive | 2005

Sealed polishing pad, system and methods

Bogdan Swedek; David J. Lischka; Jeffrey Drue David; Dominic J. Benvegnu

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Collaboration

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Boguslaw A. Swedek

Applied Materials

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Jeffrey Drue David

Applied Materials

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Harry Q. Lee

Applied Materials

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Lakshmanan Karuppiah

Applied Materials

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Bogdan Swedek

Applied Materials

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Wen-Chiang Tu

Applied Materials

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Jun Qian

Applied Materials

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Abraham Ravid

Applied Materials

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Jimin Zhang

Applied Materials

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Benjamin Cherian

Applied Materials

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