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Dive into the research topics where Mark Wilcoxson is active.

Publication


Featured researches published by Mark Wilcoxson.


Archive | 1996

Plasma processing systems

Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson; Andras Kuthi


Archive | 2000

Plasma processing system with dynamic gas distribution control

Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson


Archive | 2004

Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition

Seokmin Yun; Ji Zhu; Peter Cirigliano; Sangheon Lee; Thomas S. Choi; Peter Loewenhardt; Mark Wilcoxson; Reza Sadjadi; Eric Hudson; James V. Tietz


Archive | 2006

ENHANCED WAFER CLEANING METHOD

Seokmin Yun; John M. Boyd; Mark Wilcoxson; John M. Delarios


Archive | 2000

Materials and gas chemistries for processing systems

Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson


Archive | 2009

Method of dielectric film treatment

Seokmin Yun; Ji Zhu; John M. Delarios; Mark Wilcoxson


Archive | 2003

User interface for quantifying wafer non-uniformities and graphically explore significance

Jorge Luque; Andrew D. Bailey; Mark Wilcoxson


Archive | 2003

Method and apparatus for producing uniform processing rates

Arthur M. Howald; Andreas Kuthi; Mark Wilcoxson; Andrew D. Bailey


Archive | 2006

Post etch wafer surface cleaning with liquid meniscus

Ji Zhu; Seokmin Yun; Mark Wilcoxson; John M. de Larios


Archive | 2004

Antenna for producing uniform process rates

Mark Wilcoxson; Andrew D. Bailey

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