Is this you? Create Your Porfile
Avatar

Mark Wilcoxson

Lam Research

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Mark Wilcoxson is active.

Explore More

Publication

Featured researches published by Mark Wilcoxson.

Archive | 1996

Plasma processing systems

Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson; Andras Kuthi

Archive | 2000

Plasma processing system with dynamic gas distribution control

Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson

Archive | 2004

Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition

Seokmin Yun; Ji Zhu; Peter Cirigliano; Sangheon Lee; Thomas S. Choi; Peter Loewenhardt; Mark Wilcoxson; Reza Sadjadi; Eric Hudson; James V. Tietz

Archive | 2006

ENHANCED WAFER CLEANING METHOD

Seokmin Yun; John M. Boyd; Mark Wilcoxson; John M. Delarios

Archive | 2000

Materials and gas chemistries for processing systems

Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson

Archive | 2009

Method of dielectric film treatment

Seokmin Yun; Ji Zhu; John M. Delarios; Mark Wilcoxson

Archive | 2003

User interface for quantifying wafer non-uniformities and graphically explore significance

Jorge Luque; Andrew D. Bailey; Mark Wilcoxson

Archive | 2003

Method and apparatus for producing uniform processing rates

Arthur M. Howald; Andreas Kuthi; Mark Wilcoxson; Andrew D. Bailey

Archive | 2006

Post etch wafer surface cleaning with liquid meniscus

Ji Zhu; Seokmin Yun; Mark Wilcoxson; John M. de Larios

Archive | 2004

Antenna for producing uniform process rates

Mark Wilcoxson; Andrew D. Bailey

Explore More

Collaboration

Dive into the Mark Wilcoxson's collaboration.

Top Co-Authors
Avatar

Andrew D. Bailey

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Seokmin Yun

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Alan M. Schoepp

Lam Research

View shared research outputs
Top Co-Authors
Avatar

David Hemker

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Mark Kawaguchi

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Ji Zhu

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Eric Hudson

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Cheng-Yu (Sean) Lin

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Katrina Mikhaylichenko

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Leon Ginzburg

Lam Research

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge