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Chi-yuan Shih

TSMC

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Publication

Featured researches published by Chi-yuan Shih.

Archive | 2015

Contact structure of semiconductor device

Clement Hsingjen Wann; Ling-Yen Yeh; Chi-yuan Shih; Yen-Yu Chen

Archive | 2011

SELECTIVE FIN-SHAPING PROCESS USING PLASMA DOPING AND ETCHING FOR 3-DIMENSIONAL TRANSISTOR APPLICATIONS

Clement Hsingjen Wann; Ling-Yen Yeh; Chi-yuan Shih; Yi-Tang Lin; Chih-Sheng Chang; Chi-Wen Liu

Archive | 2015

Passivation structure of fin field effect transistor

Yen-Yu Chen; Chi-yuan Shih; Ling-Yen Yeh; Clement Hsingjen Wann

Archive | 2011

FIN FIELD EFFECT TRANSISTORS AND METHODS FOR FABRICATING THE SAME

Clement Hsingjen Wann; Ling-Yen Yeh; Chi-yuan Shih; Yi-Tang Lin; Chih-Sheng Chang

Archive | 2012

FIN FIELD-EFFECT TRANSISTORS HAVING CONTROLLED FIN HEIGHT AND METHOD OF MAKING

Clement Hsingjen Wann; Ling-Yen Yeh; Chi-yuan Shih; Yuan-Fu Shao; Wen-Huei Guo; Tung Ying Lee

Archive | 2015

Self-Aligned Dual-Metal Silicide and Germanide Formation

Clement Hsingjen Wann; Sey-Ping Sun; Ling-Yen Yeh; Chi-yuan Shih; Li-Chi Yu; Chun Hsiung Tsai; Chin-Hsiang Lin; Neng-Kuo Chen; Meng-Chun Chang; Ta-Chun Ma; Gin-Chen Huang; Yen-Chun Huang

Archive | 2016

Self-Aligned Passivation of Active Regions

Clement Hsingjen Wann; Ling-Yen Yeh; Chi-yuan Shih; Wei-Chun Tsai

Archive | 2013

Methods for forming STI regions in integrated circuits

Chih-Yu Hsu; Yi-Tang Lin; Clement Hsinjen Wann; Chih-Sheng Chang; Wei-Chun Tsai; Jyh-Cherng Sheu; Chi-yuan Shih

Archive | 2012

Method of forming fin field-effect transistors having controlled fin height

Clement Hsingjen Wann; Ling-Yen Yeh; Chi-yuan Shih; Yuan-Fu Shao; Wen-Huei Guo; Tung Ying Lee

Archive | 2015

Selective fin-shaping process

Clement Hsingjen Wann; Ling-Yen Yeh; Chi-yuan Shih; Yi-Tang Lin; Chih-Sheng Chang; Chi-Wen Liu

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Collaboration

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Ling-Yen Yeh

TSMC

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Clement Hsingjen Wann

TSMC

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Yen-Yu Chen

TSMC

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Wei-Chun Tsai

TSMC

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Yuan-Fu Shao

TSMC

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Chih-Sheng Chang

TSMC

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Yi-Tang Lin

TSMC

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Yasutoshi Okuno

TSMC

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Chi-Wen Liu

TSMC

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Tung Ying Lee

TSMC

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