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Chloe Baldasseroni

Lam Research

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Publication

Featured researches published by Chloe Baldasseroni.

Archive | 2014

METHODS AND APPARATUSES FOR SHOWERHEAD BACKSIDE PARASITIC PLASMA SUPPRESSION IN A SECONDARY PURGE ENABLED ALD SYSTEM

Adrien Lavoie; Hu Kang; Purushottam Kumar; Shankar Swaminathan; Jun Qian; Frank L. Pasquale; Chloe Baldasseroni

Archive | 2016

METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW TEMPERATURE ALD SYSTEMS BY SHOWERHEAD ACTIVE HEATING AND/OR PEDESTAL COOLING

Chloe Baldasseroni; Adrien Lavoie; Hu Kang; Jun Qian; Purushottam Kumar; Andrew Duvall; Cody Barnett; Mohamed Sabri; Ramesh Chandrasekharan; Karl Leeser; David Charles Smith; Seshasayee Varadarajan; Edmund Minshall

Archive | 2016

REDUCING BACKSIDE DEPOSITION AT WAFER EDGE

Chloe Baldasseroni; Andrew Duvall; Ryan Blaquiere; Shankar Swaminathan

Archive | 2015

Method and apparatus for backside deposition reduction by control of wafer support to achieve edge seal

Andrew Duvall; Chloe Baldasseroni

Archive | 2015

Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors

Frank L. Pasquale; Chloe Baldasseroni; Edward Augustyniak; Yukinori Sakiyama; Shankar Swaminathan

Archive | 2017

Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge

Chloe Baldasseroni; Ted Minshall; Frank L. Pasquale; Shankar Swaminathan; Ramesh Chandrasekharan

Archive | 2016

FILL ON DEMAND AMPOULE

Tuan Nguyen; Eashwar Ranganathan; Shankar Swaminathan; Adrien Lavoie; Chloe Baldasseroni; Frank L. Pasquale; Purushottam Kumar; Jun Qian; Hu Kang

Archive | 2016

Hardware And Process For Film Uniformity Improvement

Purushottam Kumar; Hu Kang; Adrien Lavoie; Yi Chung Chiu; Frank L. Pasquale; Jun Qian; Chloe Baldasseroni; Shankar Swaminathan; Karl Leeser; David Charles Smith; Wei-Chih Lai

Archive | 2017

SUPPLEMENT OF ON-DEMAND CHARGING AMPOULE

Nguyen Tuan; Eashwar Ranganathan; Shankar Swaminathan; Adrien Lavoie; Chloe Baldasseroni; Ramesh Chandrasekharan; Frank L. Pasquale; Jennifer Petraglia

Archive | 2017

SYSTEM AND METHOD CAPABLE OF LOW DEFECT TREATMENT BY CONTROLLED SEPARATION AND DELIVERY OF CHEMICAL SUBSTANCE DURING ATOMIC LAYER DEPOSITION

Ramesh Chandrasekharan; Jennifer O'loughlin; Saangrut Sangplung; Shankar Swaminathan; Frank L. Pasquale; Chloe Baldasseroni; Adrien Lavoie

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Shankar Swaminathan

Lam Research

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Frank L. Pasquale

Lam Research

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Adrien Lavoie

Lam Research

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Purushottam Kumar

Lam Research

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Ramesh Chandrasekharan

Lam Research

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David Charles Smith

Lam Research

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Hu Kang

Lam Research

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Jun Qian

Lam Research

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Karl Leeser

Lam Research

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Andrew Duvall

Lam Research

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