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Purushottam Kumar

Lam Research

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Publication

Featured researches published by Purushottam Kumar.

Archive | 2014

METHODS AND APPARATUSES FOR SHOWERHEAD BACKSIDE PARASITIC PLASMA SUPPRESSION IN A SECONDARY PURGE ENABLED ALD SYSTEM

Adrien Lavoie; Hu Kang; Purushottam Kumar; Shankar Swaminathan; Jun Qian; Frank L. Pasquale; Chloe Baldasseroni

Archive | 2016

ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL

Jun Qian; Hu Kang; Adrien Lavoie; Seiji Matsuyama; Purushottam Kumar

Archive | 2016

METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW TEMPERATURE ALD SYSTEMS BY SHOWERHEAD ACTIVE HEATING AND/OR PEDESTAL COOLING

Chloe Baldasseroni; Adrien Lavoie; Hu Kang; Jun Qian; Purushottam Kumar; Andrew Duvall; Cody Barnett; Mohamed Sabri; Ramesh Chandrasekharan; Karl Leeser; David Charles Smith; Seshasayee Varadarajan; Edmund Minshall

Archive | 2017

Multi-cycle ald process for film uniformity and thickness profile modulation

Purushottam Kumar; Adrien Lavoie; Hu Kang; Jun Qian; Tuan Nguyen; Ye Wang

Archive | 2016

FILL ON DEMAND AMPOULE

Tuan Nguyen; Eashwar Ranganathan; Shankar Swaminathan; Adrien Lavoie; Chloe Baldasseroni; Frank L. Pasquale; Purushottam Kumar; Jun Qian; Hu Kang

Archive | 2016

Hardware And Process For Film Uniformity Improvement

Purushottam Kumar; Hu Kang; Adrien Lavoie; Yi Chung Chiu; Frank L. Pasquale; Jun Qian; Chloe Baldasseroni; Shankar Swaminathan; Karl Leeser; David Charles Smith; Wei-Chih Lai

Archive | 2018

SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT

Purushottam Kumar; Adrien Lavoie; Ishtak Karim; Jun Qian; Frank L. Pasquale; Bart van Schravendijk

Archive | 2017

DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION

Purushottam Kumar; Adrien Lavoie; Jun Qian; Hu Kang; Ishtak Karim

Archive | 2017

VARIABLE TEMPERATURE HARDWARE AND METHODS FOR REDUCTION OF WAFER BACKSIDE DEPOSITION

Hu Kang; Ishtak Karim; Purushottam Kumar; Jun Qian; Ramesh Chandrasekharan; Adrien Lavoie

Archive | 2016

METHOD AND DEVICE FOR PERFORMING STABILIZED DEPOSITION SPEED CONTROL IN LOW TEMPERATURE ALD SYSTEM BY ACTIVE HEATING OF SHOWER HEAD AND/OR COOLING OF PEDESTAL

Chloe Baldasseroni; Adrien Lavoie; Kang Hu; Qian Jun; Purushottam Kumar; Andrew Duvall; Cody Barnett; Mohamed Sabri; Ramesh Chandrasekharan; Karl Leeser; David Charles Smith; Seshasayee Varadarajan; Edmund Minshall

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Adrien Lavoie

Lam Research

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Jun Qian

Lam Research

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Hu Kang

Lam Research

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Chloe Baldasseroni

Lam Research

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Frank L. Pasquale

Lam Research

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Shankar Swaminathan

Lam Research

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David Charles Smith

Lam Research

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Karl Leeser

Lam Research

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Ramesh Chandrasekharan

Lam Research

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Andrew Duvall

Lam Research

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