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Dive into the research topics where Shankar Swaminathan is active.

Publication


Featured researches published by Shankar Swaminathan.


Archive | 2011

Plasma activated conformal dielectric film deposition

Shankar Swaminathan; Jon Henri; Dennis M. Hausmann; Pramod Subramonium; Mandyam Sriram; Vishwanathan Rangarajan; Kirthi K. Kattige; Bart K. van Schravendijk; Andrew John Mckerrow


Archive | 2011

Plasma activated conformal film deposition

Adrien Lavoie; Shankar Swaminathan; Hu Kang; Ramesh Chandrasekharan; Tom Dorsh; Dennis M. Hausmann; Jon Henri; Thomas Jewell; Ming Li; Bryan Schlief; Antonio Xavier; Thomas W. Mountsier; Bart van Schravendijk; Easwar Srinivasan; Mandyam Sriram


Archive | 2012

Conformal doping via plasma activated atomic layer deposition and conformal film deposition

Shankar Swaminathan; Mandyam Sriram; Bart van Schravendijk; Pramod Subramonium; Adrien Lavoie


Archive | 2013

Gapfill of variable aspect ratio features with a composite PEALD and PECVD method

Hu Kang; Shankar Swaminathan; Jun Qian; Wanki Kim; Dennis M. Hausmann; Bart van Schravendijk; Adrien Lavoie


Archive | 2013

High pressure, high power plasma activated conformal film deposition

Shankar Swaminathan; Frank L. Pasquale; Adrien Lavoie; Karl Leeser


Archive | 2013

Methods for depositing films on sensitive substrates

Hu Kang; Shankar Swaminathan; Adrien Lavoie; Jon Henri


Archive | 2013

Sub-saturated atomic layer deposition and conformal film deposition

Shankar Swaminathan; Hu Kang; Adrien Lavoie


Archive | 2013

CONFORMAL FILM DEPOSITION FOR GAPFILL

Shankar Swaminathan; Bart van Schravendijk; Adrien Lavoie; Sesha Varadarajan; Jason Daejin Park; Michal Danek; Naohiro Shoda


Archive | 2013

SYSTEMS AND METHODS FOR MODULATING STEP COVERAGE DURING CONFORMAL FILM DEPOSITION

Shankar Swaminathan; Hu Kang; Adrien Lavoie


Archive | 2014

Soft landing nanolaminates for advanced patterning

Frank L. Pasquale; Shankar Swaminathan; Adrien Lavoie; Nader Shamma; Girish Dixit

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