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Chung-Ho Huang

Lam Research

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Publication

Featured researches published by Chung-Ho Huang.

Archive | 2002

Plasma processing method and apparatus with control of plasma excitation power

Tuqiang Ni; Frank Y. Lin; Chung-Ho Huang; Weinan Jiang

Archive | 2001

Plug and play sensor integration for a process module

Chung-Ho Huang; Andrew Lui; David Hemker

Archive | 2000

Integrated full wavelength spectrometer for wafer processing

Tuqiang Ni; Tuan Ngo; Chung-Ho Huang; Andrew Lui; Farro F. Kaveh

Archive | 2007

Recipe-and-component control module and methods thereof

Chung-Ho Huang; Andrew Lui

Archive | 2010

METHODS FOR PERFORMING DATA MANAGEMENT FOR A RECIPE-AND-COMPONENT CONTROL MODULE

Chung-Ho Huang; Andrew Lui

Archive | 2000

Etch endpoint detection

Tuqiang Ni; Andrew Lui; Chung-Ho Huang; Weinan Jiang

Archive | 2007

Recipe report card framework and methods thereof

Chung-Ho Huang; Robert C. Hefty; Andrew Lui; Dave Humbird; Charles Potter

Archive | 2008

Module de gestion formule-et-composant, et procédés correspondants

Chung-Ho Huang; Andrew Lui

Archive | 2001

Sensor-integration mit "plug and play" funktion für ein prozessmodul

Chung-Ho Huang; David Hemker; Andrew Lui

Archive | 2001

PLASMA PROCESSING DEVICE WITH INTEGRATED FULL WAVELENGTH SPECTROMETER FOR WAFER PROCESSING

Ni Tuqiang; Tuan Ngo; Chung-Ho Huang; Andrew Lui; Farro F. Kaveh

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Collaboration

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Andrew Lui

Lam Research

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Tuqiang Ni

Lam Research

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David Hemker

Lam Research

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Farro F. Kaveh

Lam Research

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Tuan Ngo

Lam Research

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Weinan Jiang

Lam Research

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Charles Potter

Lam Research

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Dave Humbird

Lam Research

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Frank Y. Lin

Lam Research

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Ni Tuqiang

Lam Research

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