Claudia Ekstein | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Claudia Ekstein is active.

Explore More

Publication

Featured researches published by Claudia Ekstein.

Archive | 2009

Composite structure for microlithography and optical arrangement

Claudia Ekstein; Hubert Holderer

Archive | 2007

Support structure for temporarily supporting a substrate

Yim-Bun Patrick Kwan; Hubert Holderer; Johannes Deyhle; Claudia Ekstein

Archive | 2009

Method and device for connecting an optical element to a frame

Armin Schoeppach; Johnannes Rau; Gennady Fedosenko; Leonid Gorkhover; Gerd Klose; Stefan Wiesner; Hans-Joachim Trefz; Michael Widmann; Ulrich Bingel; Claudia Ekstein; Guenter Albrecht

Archive | 2012

Substrat für Spiegel für die EUV-Lithographie

Claudia Ekstein; Johannes Lippert; Holger Maltor; Martin Weiser; Heiko Siekmann; Udo Dinger

Archive | 2006

Method for connecting an optical element with a fitting on at least one connecting site used in semiconductor lithography comprises indirectly or directly positioning the element and the fitting during connection using a support element

Günter Albrecht; Ulrich Bingel; Claudia Ekstein; Gennady Fedosenko; Leonid Gorkhover; Gerd Klose; Johannes Rau; Armin Schöppach; Hans-Jochaim Trefz; Michael Widmann; Stefan Wiesner

Archive | 2013

Substrate for mirrors for EUV lithography

Claudia Ekstein; Johannes Lippert; Holger Maltor; Martin Weiser; Heiko Siekmann; Udo Dinger

Archive | 2008

Verbundstruktur für die Mikrolithographie und optische Anordnung

Claudia Ekstein; Hubert Holderer

Archive | 2012

Substrate for mirror for extreme ultraviolet lithography, comprises base body which is alloy system that is made of intermetallic phase having crystalline component, where intermetallic phase has bravais lattice

Claudia Ekstein; Holger Maltor

Archive | 2012

Verfahren zur Herstellung eines Substrates für ein reflektives optisches Element für die EUV-Lithographie

Holger Maltor; Claudia Ekstein

Archive | 2015

Projektionsobjektiv mit Wellenfrontmanipulator

Maike Trenkel-Lenz; Wolfgang Scherm; Holger Walter; Vladimir Kamenov; Michael Stolz; Johannes Lippert; Axel Lorenz; Andreas Frommeyer; Claudia Ekstein; Pascal Marsollek; Stephanus Fengler; Wolfgang Emer; Ulrich Löring; Boris Bittner

Explore More