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Johannes Lippert

Carl Zeiss AG

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Publication

Featured researches published by Johannes Lippert.

Archive | 2004

Apparatus for manipulation of an optical element

Michael Muehlbeyer; Johannes Lippert

Archive | 2002

Imaging device in a projection exposure facility

Wolfgang Hummel; Juergen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schoengart; Markus Neumaier; Baerbel Trossbach; Ulrich Weber; Michael Muehlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

Archive | 2009

Device consisting of at least one optical element

Yim-Bun Patrick Kwan; Michael Muehlbeyer; Johannes Lippert

Archive | 2007

Imaging device in a projection exposure machine

Wolfgang Hummel; Jürgen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schöngart; Markus Neumaier; Bärbel Trossbach; Ulrich Weber; Michael Mühlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

Archive | 2003

Method for the targeted deformation of an optical element

Jean Noel Fehr; Johannes Lippert; Steffen Fritzsche; Michael Muehlbeyer; Harald Kirchner

Archive | 2013

Device for displacing micromirror in optical module of illumination system, has compensating unit compensating linear displacement of micromirror or predetermined pivot axis during pivoting of micromirror

Johannes Lippert; Matthias Hartmann; Severin Waldis; Yanko Sarov; Adrian Staicu; Benedikt Knauf

Archive | 2012

OPTICAL ELEMENT FOR UV OR EUV LITHOGRAPHY

Johannes Lippert; Dirk Schaffer

Archive | 2012

Substrat für Spiegel für die EUV-Lithographie

Claudia Ekstein; Johannes Lippert; Holger Maltor; Martin Weiser; Heiko Siekmann; Udo Dinger

Archive | 2011

Optische Anordnung in einem optischen System, insbesondere einer Beleuchtungseinrichtung

Hubert Holderer; Johannes Lippert; Armin Schöppach

Archive | 2013

Substrate for mirrors for EUV lithography

Claudia Ekstein; Johannes Lippert; Holger Maltor; Martin Weiser; Heiko Siekmann; Udo Dinger

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Hubert Holderer

Carl Zeiss AG

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Michael Muehlbeyer

Carl Zeiss AG

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Pascal Marsollek

Carl Zeiss AG

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Ulrich Weber

Carl Zeiss AG

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Alexander Kohl

Carl Zeiss AG

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Erich Merz

Carl Zeiss AG

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Jochen Weber

Carl Zeiss AG

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Karl-Eugen Aubele

Carl Zeiss AG

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Klaus Rief

Carl Zeiss AG

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Markus Neumaier

Carl Zeiss AG

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