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Terrance M. Wright

IBM

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Publication

Featured researches published by Terrance M. Wright.

Archive | 1987

Anisotropic etch process for tungsten metallurgy.

William J. Cote; Karey L. Holland; Terrance M. Wright

Archive | 1990

Process for forming refractory metal silicide layers of different thicknesses in an integrated circuit

Thomas J. Hartswick; Carter Welling Kaanta; Pei-Ing P. Lee; Terrance M. Wright

Archive | 1997

Polishing pad with controlled release of desired micro-encapsulated polishing agents

Matthew Kilpatrick Miller; Clifford Owen Morgan; Matthew J. Rutten; Erick G. Walton; Terrance M. Wright

Archive | 1997

CMP polishing pad backside modifications for advantageous polishing results

Roger W. Cheek; John Edward Cronin; Douglas P. Nadeau; Matthew J. Rutten; Terrance M. Wright

Archive | 1999

Method and apparatus for slurry polishing

Clifford Owen Morgan; Matthew J. Rutten; Erick G. Walton; Terrance M. Wright

Archive | 1998

Chemical mechanical polishing of multiple material substrates and slurry having improved selectivity

Donald F. Canaperi; Rangarajan Jagannathan; Mahadevaiyer Krishnan; Clifford Owen Morgan; Terrance M. Wright

Archive | 1991

Process for forming refractory metal silicide layers in an integrated circuit

Thomas J. Hartswick; Carter Welling Kaanta; Pei-Ing P. Lee; Terrance M. Wright

Archive | 1989

Etching metal films with complexing chloride plasma

Robert Crowell Bausmith; William J. Cote; John Edward Cronin; Karey L. Holland; Carter Welling Kaanta; Pei-Ing P. Lee; Terrance M. Wright

Archive | 1997

Gas discharge devices including matrix materials with ionizable gas filled sealed cavities

Clifford Owen Morgan; Matthew J. Rutten; Erick G. Walton; Terrance M. Wright

Archive | 1997

Vertical polishing device and method

Matthew Kilpatrick Miller; Matthew J. Rutten; Terrance M. Wright

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Carter Welling Kaanta

IBM

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Karey L. Holland

IBM

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Matthew J. Rutten

IBM

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William J. Cote

IBM

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Clifford Owen Morgan

IBM

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John Edward Cronin

IBM

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Erick G. Walton

IBM

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Pei-Ing P. Lee

IBM

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Robert Crowell Bausmith

IBM

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Donald F. Canaperi

IBM

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