James H. Tsung | Researchain

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Featured researches published by James H. Tsung.

Archive | 1999

Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance

Darryl Angelo; Arvind Sundarrajan; Peijun Ding; James H. Tsung; Ilyoung Richard Hong; Barry Chin

Archive | 2003

Small epicyclic magnetron with controlled radial sputtering profile

Michael Miller; James H. Tsung; Daniel C. Lubben; Ilyoung Richard Hong; Peijun Ding

Archive | 2002

Small planetary magnetron

Ilyoung Richard Hong; James H. Tsung; Daniel C. Lubben; Peijun Ding; Nirmalya Maity

Archive | 2002

Design of hardware features to facilitate arc-spray coating applications and functions

Alan Barry Liu; Chien-Shiung Tzou; James H. Tsung

Archive | 2001

Enhanced cooling IMP coil support

Richard Hong; James H. Tsung; Gunnar Vatvedt; Peijun Ding; Arvind Sundarrajan

Archive | 2004

Magnetron executing planetary motion adjacent a sputtering target

Ilyoung Richard Hong; James H. Tsung; Daniel C. Lubben; Peijun Ding; Nirmalya Maity

Archive | 2006

Small Scanned Magentron

Ilyoung Richard Hong; James H. Tsung; Daniel C. Lubben; Peijun Ding; Nirmalya Maity

Archive | 2000

Ionized metal plasma copper vapor deposition improved in capacity of grain in thin film

Darryl Angelo; Barry Chin; Peijun Ding; Richard Hong; Arvind Sundarrajan; James H. Tsung; スンダラヤンアルヴィンド; リチャードホンイリョウン; エイチツンジェームズ; アンジェロダーリル; チンバリー; ディンペイユン

Archive | 2005