Dietmar Temmler

Field effect transistor and method for production thereof

Method of producing a structure on the surface of a substrate

Field effect transistor and method for fabricating it

Memory with trench capacitor and selection transistor and method for fabricating it

Field effect transistor and method for the production thereof

Method for fabricating a deep trench capacitor for dynamic memory cells

Semiconductor memory cell with trench capacitor and selection transistor and method for fabricating it

Trench and a trench capacitor and method for forming the same

Method for fabricating a buried conductive connection to a trench capacitor and a memory cell with such a connection

Semiconductor memory cell and method for fabricating the memory cell