Dong-woon Shin

S-RCAT (sphere-shaped-recess-channel-array transistor) technology for 70nm DRAM feature size and beyond

For the first time, S-RCAT (sphere-shaped-recess-channel-array transistor) technology has been successfully developed in a 2Gb density DRAM with 70nm feature size. It is a modified structure of the RCAT (recess-channel-array transistor) and shows an excellent scalability of recessed-channel structure to sub-50nm feature size. The S-RCAT demonstrated superior characteristics in DIBL, subthreshold swing (SW), body effect, junction leakage current and data retention time, comparing to the RCAT structure, in this paper, S-RCAT is proved to be the most promising DRAM array transistor suitable for sub-50nm and mobile applications.

High-density low-power-operating DRAM device adopting 6F/sup 2/ cell scheme with novel S-RCAT structure on 80nm feature size and beyond

For the first time, the DRAM device composed of 6F/sup 2/ open-bit-line memory cell with 80nm feature size is developed. Adopting 6F/sup 2/ scheme instead of customary 8F/sup 2/ scheme made it possible to reduce chip size by up to nearly 20%. However, converting the cell scheme to 6F/sup 2/ accompanies some difficulties such as decrease of the cell capacitance, and more compact core layout. To overcome this strict obstacles which are originally stemming from the conversion of cell scheme to 6F/sup 2/, TIT structure with AHO (AfO/AlO/AfO) is adopted for higher cell capacitance, and bar-type contact is adopted for adjusting to compact core layout. Moreover, to lower cell V/sub th/ so far as suitable for characteristic of low power operation, the novel concept, S-RCAT (sphere-shaped-recess-channel-array transistor) is introduced. It is the improved scheme of RCAT used in 8F/sup 2/ scheme. By adopting S-RCAT, V/sub th/ can be lowered, SW, DIBL are improved. Additionally, data retention time characteristic can be improved.

Novel robust cell capacitor (Leaning Exterminated Ring type Insulator) and new storage node contact (Top Spacer Contract) for 70nm DRAM technology and beyond

For the first time, novel robust capacitor (Leaning exterminated Ring type Insulator - LERI) and new storage node (SN) contact process (Top Spacer Contact - TSC) are successfully developed with 82nm feature size. These novel processes drastically improved electrical characteristics such as cell capacitance, parasitic bit line capacitance and cell contact resistance, compared to a conventional process. The most pronounced effect using the LERI in COB structure is to greatly improve cell capacitance without twin bit failure. In addition, the TSC technology has an ability to remove a critical ArF lithography. By using the LERI and TSC processes in 82nm 512M DDR DRAM, the cell capacitance of 32fF/cell is achieved with Toxeq of 2.3nm and the parasitic bit line capacitance is reduced by 20%, resulted in great improvement of tRCD (1.5ns).

SAT0176 A Phase I Pharmacokinetic Study Comparing SB4, An Etanercept Biosimilar, and Etanercept Reference Product (Enbrel®) in Healthy Male Subjects

Background SB4, a biosimilar to etanercept reference product (ETN), has an identical amino acid sequence, similar physicochemical and in vitro functional properties to its reference drug. Objectives The primary objective of this study was to demonstrate pharmacokinetic (PK) equivalence between SB4 and EU sourced ETN (EU-ETN), between SB4 and US sourced ETN (US-ETN), and between EU-ETN and US-ETN. Safety, tolerability, and immunogenicity were investigated as secondary objectives. Methods This study was a randomised, single-blind, three-part (Part A, Part B and Part C), 2-treatment, 2-period cross-over study in 138 healthy male subjects. In each part, 46 subjects were randomised in a 1:1 manner to receive a single 50 mg subcutaneous dose of SB4 or the reference drug (Part A: SB4 or EU-ETN, Part B: SB4 or US-ETN, Part C: EU-ETN or US-ETN) in Period 1 followed by the cross-over treatment in Period 2 according to their assigned treatment sequence. Study treatments were separated by a 28 day washout period. PK assessment was performed 21 days after the treatment in each period. Immunogenicity was assessed at pre-dose and 28 days after the first treatment in Period 1. The primary PK parameters were area under the concentration-time curve from time zero to infinity (AUCinf) and maximum concentration (Cmax). Equivalence for the primary PK parameters was to be concluded if the 90% confidence interval (CI) of the ratio of geometric least squares means (LSMeans) of the groups compared were completely contained within the pre-defined equivalence margin of 0.8 to 1.25 using an analysis of variance (ANOVA). Results The geometric LSMeans ratio of AUCinf and Cmax were 0.990 and 1.037 (Part A), 1.011 and 1.044 (Part B), and 1.005 and 1.033 (Part C), respectively. All 90% CIs for the primary PK parameter comparisons in Part A, B, and C were completely contained within the pre-defined equivalence margin (Table). The proportion of subjects who experienced treatment-emergent adverse events (TEAEs) was comparable between SB4 and EU-ETN (39.1% vs. 34.8%), SB4 and US-ETN (50.0% vs. 43.5%), and between EU-ETN and US-ETN (37.0% vs. 30.4%) in each part. The most frequent TEAEs reported were nasopharyngitis, headache, and injection site reaction. The majority of TEAEs reported was mild or moderate in severity and transient. There were no serious adverse events (SAEs) or deaths reported during the study. Table 1. Comparison of primary PK parameters between the treatments PK parameters Ratio 90% CI Part A: SB4 vs EU-ETN AUCinf (μg·h/mL) 0.990 0.947; 1.036 Cmax (μg/mL) 1.037 0.985; 1.092 Part B: SB4 vs US-ETN AUCinf (μg·h/mL) 1.011 0.958; 1.067 Cmax (μg/mL) 1.044 0.977; 1.114 Part C: EU-ETN vs US-ETN AUCinf (μg·h/mL) 1.005 0.915; 1.104 Cmax (μg/mL) 1.033 0.947; 1.127 Conclusions This study demonstrated PK equivalence of SB4 to EU-ETN, of SB4 to US-ETN, and of EU-ETN to US-ETN in healthy male subjects. All three etanercept products were generally well tolerated with similar safety profiles. Disclosure of Interest Y. J. Lee Employee of: Samsung Bioepis, D. Shin Employee of: Samsung Bioepis, Y. Kim Employee of: Samsung Bioepis, J. W. Kang Employee of: Samsung Bioepis, R. Fuhr Grant/research support from: Samsung Bioepis, A. Gauliard Grant/research support from: Samsung Bioepis

FRI0110 A Phase I Pharmacokinetic Study Comparing SB5, An Adalimumab Biosimilar, And Adalimumab Reference Product (Humira®) in Healthy Subjects

Background SB5, a biosimilar to adalimumab reference product (ADL), has an identical amino acid sequence, similar physicochemical and in vitro functional properties to its reference drug. Objectives The primary objective of this study was to demonstrate pharmacokinetic (PK) equivalence between SB5 and EU sourced ADL (EU-ADL), SB5 and US sourced ADL (US-ADL), and between EU-ADL and US-ADL. Safety, tolerability, and immunogenicity were investigated as secondary objectives. Methods This study was a randomised, single-blind, 3-arm, parallel group study in 189 healthy subjects. In each arm, all subjects received a single 40 mg dose of SB5, EU-ADL, or US-ADL by subcutaneous injection on Day 1 and then were observed for 71 days during which the PK, safety, tolerability, and immunogenicity measurements were made. The serum concentration of adalimumab was measured using an enzyme-linked immunosorbent assay (ELISA). The primary PK parameters were area under the concentration-time curve from time zero to infinity (AUCinf), area under the concentration-time curve from time zero to the last quantifiable concentration (AUClast), and maximum concentration (Cmax). Equivalence for the primary PK parameters was to be concluded if the 90% confidence intervals (CIs) for the ratio of geometric least squares means (LSMeans) of the groups compared were completely contained within the pre-defined equivalence margin of 0.8 to 1.25 using an analysis of variance (ANOVA). Results All of the 90% CIs for the geometric LSMeans ratios of primary PK parameters for SB5 and EU-ADL comparison, SB5 and US-ADL comparison, and EU-ADL and US-ADL comparison were within the pre-defined equivalence margin of 0.8 to 1.25 (Table). The proportion of subjects who experienced treatment-emergent adverse events (TEAEs) was comparable between the SB5, EU-ADL, and US-ADL groups. The most frequent TEAEs were nasopharyngitis and headache. The majority of TEAEs were mild to moderate in severity. Two serious adverse events (SAEs) were reported. Both SAEs were assessed not to be related to the study drugs. There were no statistically significant differences in the incidence of post-dose anti-drug antibodies between the three groups. Table 1. Comparison of primary PK parameters between the treatments Comparison PK parameters Ratio 90% CI SB5 vs EU-ADL AUCinf (μg·h/mL) 0.990 0.885; 1.108 AUClast (μg·h/mL) 1.027 0.915; 1.153 Cmax (μg/mL) 0.957 0.870; 1.054 SB5 vs US-ADL AUCinf (μg·h/mL) 1.001 0.890; 1.126 AUClast (μg·h/mL) 1.025 0.911; 1.153 Cmax (μg/mL) 0.972 0.881; 1.073 EU-ADL vs US-ADL AUCinf (μg·h/mL) 1.011 0.904; 1.131 AUClast (μg·h/mL) 0.998 0.887; 1.122 Cmax (μg/mL) 1.016 0.920; 1.121 Conclusions This study demonstrated PK equivalence between SB5 and EU-ADL, SB5 and US-ADL, and between EU-ADL and US-ADL in healthy subjects. All three adalimumab products were generally well tolerated with similar safety profiles. Disclosure of Interest D. Shin Employee of: Samsung Bioepis, Y. Kim Employee of: Samsung Bioepis, H. S. Kim Employee of: Samsung Bioepis, R. Fuhr Grant/research support from: Samsung Bioepis, T. Körnicke Grant/research support from: Samsung Bioepis

Improved Cell Performance for sub-50 nm DRAM with Manufacturable Bulk FinFET Structure

FinFET, the milestone for sub-50 nm DRAM cell transistor has been successfully demonstrated by a unique fabricating method with novel concept. We obtained a core solution of front-end-of-line process and structure, focusing on short channel behavior, off-state leakage, and saturation current. We have developed the scheme that is able to suppress off-state leakage current below 1 fA/cell with p+ poly-Si gate. We have also examined mobility and parasitic engineering techniques to maximize the cell performance (DeltaIon > 48 %). In conclusion, we propose the effective guideline for highly manufacturable FinFET for DRAM application at the sub-50 nm node.

SAT0144 A Phase I Pharmacokinetic Study Comparing SB2, An Infliximab Biosimilar, And Infliximab Reference Product (Remicade®) in Healthy Subjects

Background SB2, a biosimilar to infliximab reference product (INF), has an identical amino acid sequence and similar physicochemical and in vitro functional properties to its reference drug. Objectives The primary objective of this study was to demonstrate pharmacokinetic (PK) equivalence between SB2 and EU sourced INF (EU-INF), SB2 and US sourced INF (US-INF), and between EU-INF and US-INF. Safety, tolerability, and immunogenicity were investigated as secondary objectives. Methods This study was a randomised, single-blind, 3-arm, parallel group study in 159 healthy subjects. In each arm, all subjects received a single 5 mg/kg dose of SB2, EU-INF, or US-INF by intravenous infusion on Day 1 and then were observed for 71 days during which the PK, safety, tolerability, and immunogenicity measurements were made. The serum concentration of infliximab was measured using an enzyme-linked immunosorbent assay (ELISA). The primary PK parameters were area under the concentration-time curve from time zero to infinity (AUCinf), area under the concentration-time curve from time zero to the last quantifiable concentration (AUClast), and maximum concentration (Cmax). Equivalence for the primary PK parameters was to be concluded if the 90% confidence intervals (CIs) for the ratio of geometric least squares means (LSMeans) of the groups compared were completely contained within the pre-defined equivalence margin of 0.8 to 1.25 using an analysis of variance (ANOVA). Results All of the 90% CIs for the geometric LSMeans ratios of primary PK parameters for SB2 and EU-INF comparison, SB2 and US-INF comparison, and EU-INF and US-INF comparison were within the pre-defined equivalence margin of 0.8 to 1.25 (Table). The proportion of subjects who experienced treatment-emergent adverse events (TEAEs) was comparable between the SB2, EU-INF, and US-INF groups. The most frequent TEAEs were nasopharyngitis and headache. The majority of TEAEs were mild to moderate in severity. Three serious adverse events (SAEs) were reported in two subjects from SB2 group where one SAE was assessed to be related to the study drug: one subject had a Borrelia infection which resolved without sequelae. There were no statistically significant differences in the incidence of post-dose anti-drug antibodies between the three groups. Table 1. Comparison of primary PK parameters between the treatments Comparison PK parameters Ratio 90% CI SB2 vs EU-INF AUCinf (μg·h/mL) 0.986 0.897; 1.083 AUClast (μg·h/mL) 0.994 0.915; 1.079 Cmax (μg/mL) 1.007 0.964; 1.052 SB2 vs US-INF AUCinf (μg·h/mL) 0.979 0.894; 1.072 AUClast (μg·h/mL) 0.981 0.904; 1.064 Cmax (μg/mL) 0.985 0.942; 1.030 EU-INF vs US-INF AUCinf (μg·h/mL) 0.993 0.908; 1.086 AUClast (μg·h/mL) 0.987 0.913; 1.067 Cmax (μg/mL) 0.978 0.935; 1.024 Conclusions This study demonstrated PK equivalence between SB2 and EU-INF, SB2 and US-INF, and between EU-INF and US-INF in healthy subjects. All three infliximab products were generally well tolerated with similar safety profiles. Disclosure of Interest D. Shin Employee of: Samsung Bioepis, Y. Kim Employee of: Samsung Bioepis, Y. S. Kim Employee of: Samsung Bioepis, R. Fuhr Grant/research support from: Samsung Bioepis, T. Körnicke Grant/research support from: Samsung Bioepis

Pre-Metal Dielectric Stress Engineering by a Novel Plasma Treatment and Integration Scheme for nMOS Performance Improvement

For the first time, a transistor performance improvement is achieved by increasing the tensile stress of O3-TEOS pre-metal dielectric (PMD) using a novel plasma treatment and integration scheme. Plasma-treated O3-TEOS films show more tensile stress value about twice than that of an as-deposited O3 -TEOS film. The novel process shows up to 10% improvement of Ion for nMOS without any cost of pMOS degradation

AB0308 A Phase I Pharmacokinetic Study Comparing Pre-Filled Pen and Pre-Filled Syringe of SB5, An Adalimumab Biosimilar in Healthy Subjects

Background SB5 is developed as a biosimilar of the Adalimumab reference product (ADL). Equivalence in the pharmacokinetics (PK) between pre-filled syringe (PFS) of SB5 and PFS of ADL was demonstrated in a phase I study conducted in healthy subjects1 and equivalent efficacy and comparable safety between PFS of SB5 and PFS of ADL up to week 24 were demonstrated in the phase III study conducted in patients with rheumatoid arthritis2. Objectives To investigate and compare the PK, safety, and tolerability of the pre-filled pen (Pen) and PFS of SB5 in healthy subjects. Methods This study was a randomised, open-label, single-dose, 2-arm, parallel group study in healthy subjects. Subjects were randomised in a 1:1 manner to receive a single 40 mg dose of SB5-Pen or SB5-PFS by subcutaneous injection on Day 1 and then were observed for 57 days during which the PK, safety, and tolerability measurement were made. The serum concentration of adalimumab was measured using an enzyme-linked immunosorbent assay. The primary PK parameters were area under the concentration-time curve from time zero to infinity (AUCinf), area under the concentration-time curve from time zero to the last quantifiable concentration (AUClast), and maximum concentration (Cmax). Equivalence for the primary PK parameters was to be concluded if the 90% confidence intervals (CIs) for the ratio of geometric least squares means (LSMeans) of the groups compared were completely contained within the pre-defined equivalence margin of 0.8 to 1.25 using an analysis of variance. Results Of 190 randomised subjects, 1 subject was excluded from the PK population in each arm (non-compliance with medication dosage in SB5-Pen and exclusion criteria met in SB5-PFS) and 188 subjects were analysed as PK population (n=94 in SB5-Pen and SB5-PFS each). Following single dose, the mean of AUCinf, AUClast, and Cmax were 2743.2 μg·h/mL, 2329.2 μg·h/mL, and 3.803 μg/mL for the SB5-Pen and 2503.3 μg·h/mL, 2182.2 μg·h/mL, and 3.673 μg/mL for the SB5-PFS. 90% CIs for the geometric LSMeans ratios of primary PK parameters for SB5-Pen and SB5-PFS were within the pre-defined equivalence margin of 0.8 to 1.25 (Table), confirming the bioequivalence between SB5-Pen and SB5-PFS. The proportion of subjects who experienced treatment-emergent adverse events (TEAEs) was comparable between the SB5-Pen and SB5-PFS (68.4% in SB5-Pen vs 60.6% in SB5-PFS). The most frequent TEAEs were upper respiratory tract infection (15.8% in SB5-Pen vs 19.1% in SB5-PFS). The majority of TEAEs were mild in severity. Only one subject in SB5-PFS experienced a moderate injection site reaction.Table 1. Comparison of primary PK parameters between the treatments Comparison PK parameters Ratio 90% CI SB5-Pen vs SB5-PFS AUCinf(μg·h/mL) 1.104 0.9953; 1.2240 AUClast(μg·h/mL) 1.070 0.9802; 1.1687 Cmax (μg/mL) 1.021 0.9503; 1.0968 Conclusions This study demonstrated PK equivalence between SB5-Pen and SB5-PFS in healthy subjects. Both SB5-Pen and SB5-PFS were generally well tolerated with similar safety profiles. References Shin D et al. Ann Rheum Dis. 2015; 74 (Suppl2: 459–460), FRI0110 Weinblatt ME et al. Arthritis Rheumatol. 2015; 67 (suppl 10), 8L Disclosure of Interest D. Shin Employee of: Samsung Bioepis, Y. Lee Employee of: Samsung Bioepis, J. W. Kang Employee of: Samsung Bioepis, R. Ellis-Pegler Grant/research support from: Samsung Bioepis