Is this you? Create Your Porfile
Avatar

Klaus Rief

Carl Zeiss AG

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Klaus Rief is active.

Explore More

Publication

Featured researches published by Klaus Rief.

Archive | 2002

Imaging device in a projection exposure facility

Wolfgang Hummel; Juergen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schoengart; Markus Neumaier; Baerbel Trossbach; Ulrich Weber; Michael Muehlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

Archive | 2009

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD

Mariella Beckenbach; Klaus Rief; Andreas Bertele; Benjamin Sigel; Sascha Bleidistel; Wolfgang Hummel; Andreas Frommeyer; Toralf Gruner; Jochen Schwaer; Baerbel Schwaer; Thomas Schletterer; Artur Hoegele; Armin Schoeppach

Archive | 2007

Imaging device in a projection exposure machine

Wolfgang Hummel; Jürgen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schöngart; Markus Neumaier; Bärbel Trossbach; Ulrich Weber; Michael Mühlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

Archive | 2007

Projection objective for a microlithography apparatus with improved imaging properties and method for improving the imaging properties of the projection objective

Mariella Beckenbach; Klaus Rief; Andreas Bertele; Benjamin Sigel; Sascha Bleidistel; Wolfgang Hummel; Andreas Frommeyer; Toralf Gruner; Jochen Schwaer; Baerbel Schwaer; Thomas Schletterer; Artur Hoegele; Armin Schoeppach

Archive | 2008

PROJECTION OBJECTIVE FOR SEMICONDUCTOR LITHOGRAPHY

Klaus Rief

Archive | 2013

METHOD FOR MOVING AN OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY

Karl-Eugen Aubele; Sven Ulmer; Klaus Rief; Marco Jassmann

Archive | 2012

OPTICAL DEVICES HAVING KINEMATIC COMPONENTS

Jochen Weber; Klaus Rief; Claudia Matano; Benjamin Sigel; Joachim Siegel

Archive | 2008

OPTICAL APPARATUS HAVING MOVING MEMBER FOR MANIPULATING AND/OR DETERMINING POSITION

Weber Jochen; Klaus Rief; Claudia Matano; Sigel Benjamin; Siegel Joachim

Archive | 2007

HOLDING DEVICE FOR AN OPTICAL ELEMENT WITH SUPPORT FORCE EQUALIZATION

Klaus Rief; Yuanbo Kong

Archive | 2012

Bewegung eines optischen elements in einer mikrolithografischen projektionsbelichtungsanlage

Karl-Eugen Aubele; Sven Ulmer; Klaus Rief; Marco Jassmann

Explore More

Collaboration

Dive into the Klaus Rief's collaboration.

Top Co-Authors
Avatar

Karl-Eugen Aubele

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Wolfgang Hummel

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Jochen Weber

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Alexander Kohl

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Erich Merz

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Hubert Holderer

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Johannes Lippert

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Markus Neumaier

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Thorsten Rassel

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Ulrich Weber

Carl Zeiss AG

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge