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Erik H. Engdahl

Lam Research

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Publication

Featured researches published by Erik H. Engdahl.

Archive | 1997

Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher

Rahul Jairath; Jiri Pecen; Saket Chadda; Wilbur C. Krusell; Jerauld J. Cutini; Erik H. Engdahl

Archive | 1997

Sensors for a linear polisher

Anil K. Pant; Joseph R. Breivogel; Douglas W. Young; Rahul Jairath; Erik H. Engdahl

Archive | 2000

Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed

Ben Mooring; Wilbur C. Krusell; Glenn W. Travis; Erik H. Engdahl

Archive | 2002

Linear reciprocating disposable belt polishing method and apparatus

Wilbur C. Krusell; Glenn W. Travis; Erik H. Engdahl; James Bagley

Archive | 2000

Method and apparatus for stabilizing the process temperature during chemical mechanical polishing

Robert G. Boehm; Anil K. Pant; Wilbur C. Krusell; Erik H. Engdahl

Archive | 2000

Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers

Michael R. Vogtmann; Chris Frederickson; Jeff Gasparitsch; Gene Hempel; Erik H. Engdahl

Archive | 2001

Method of transporting a semiconductor wafer in a wafer polishing system

Erik H. Engdahl; Edward T. Ferri; Wilbur C. Krusell; Rahul Jairath

Archive | 2001

Apparatus for controlling leading edge and trailing edge polishing

Cangshan Xu; Jeff Gasparitsch; Robert Taff; Kenneth J. Bahng; Paul Stasiewicz; Erik H. Engdahl

Archive | 2001

Low friction gimbaled substrate holder for CMP apparatus

Erik H. Engdahl; Michael David Steiman; Paul Stasiewicz

Archive | 2002

Support for a polishing belt

Cangshan Xu; Jeff Gasparitsch; Robert Taff; Kenneth J. Bahng; Paul Stasiewicz; Erik H. Engdahl; Travis R. Taylor

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Wilbur C. Krusell

Lam Research

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Rahul Jairath

Lam Research

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Jeff Gasparitsch

Lam Research

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Anil K. Pant

Lam Research

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Paul Stasiewicz

Lam Research

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Cangshan Xu

Lam Research

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Chris Frederickson

Lam Research

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Glenn W. Travis

Lam Research

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Jerauld J. Cutini

Lam Research

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Jiri Pecen

Lam Research

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