Jiri Pecen | Researchain

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Featured researches published by Jiri Pecen.

Archive | 2000

Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing

Jiri Pecen; Saket Chadda; Rahul Jairath; Wilbur C. Krusell

Archive | 1999

Wafer polishing device with movable window

Rajeev Bajaj; Herbert E. Litvak; Rahul K. Surana; Stephen Jew; Jiri Pecen

Archive | 1998

Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing

Jiri Pecen; John Fielden; Saket Chadda; Lloyd J. Lacomb; Rahul Jairath; Wilbur C. Krusell

Archive | 1997

Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher

Rahul Jairath; Jiri Pecen; Saket Chadda; Wilbur C. Krusell; Jerauld J. Cutini; Erik H. Engdahl

Archive | 1998

Verfahren und Vorrichtung zum Überwachen der Dicke mit einem Mehrwellenlängen-Spektrometer in einem chemisch-mechanischen Polierverfahren

Saket Chadda; John Fielden; Rahul Jairath; Wilbur C. Krussel; Jr Lloyd J. Lacomb; Jiri Pecen

Archive | 1998

METHOD AND DEVICE MONITORING THICKNESS ON THE SPOT USING MULTIPLEX WAVE LENGTH SPECTROMETER DURING CHEMICAL AND MECHANICAL POLISHING

Saket Chadda; John Fielden; Rahul Jairath; Wilbur C. Krussel; Jr Lloyd J. Lacomb; Jiri Pecen; シークラッセルウィルバー; チャッダサケット; フィールデン，ジョン; ペセンジリ; ジャイラスラフル; ジェイラコームジュニアロイド

Archive | 1998