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Glenn W. Travis

Lam Research

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Publication

Featured researches published by Glenn W. Travis.

Archive | 2000

Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed

Ben Mooring; Wilbur C. Krusell; Glenn W. Travis; Erik H. Engdahl

Archive | 2000

Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization

Michael Labunsky; Tac Huynh; Anthony S. Meyer; Andrew J. Nagengast; Glenn W. Travis

Archive | 2002

Linear reciprocating disposable belt polishing method and apparatus

Wilbur C. Krusell; Glenn W. Travis; Erik H. Engdahl; James Bagley

Archive | 2000

Method and apparatus for chemically-mechanically polishing semiconductor wafers

Glenn W. Travis; Christopher Pena

Archive | 2000

Wafer carrier head assembly

Glenn W. Travis

Archive | 2003

Apparatus for wafer carrier in-process clean and rinse

Glenn W. Travis

Archive | 2002

System for wafer carrier in-process clean and rinse

Damon Vincent Williams; Glenn W. Travis

Archive | 1999

Polishing head for chemical mechanical polishing using linear planarization technology

Anil K. Pant; Douglas W. Young; Glenn W. Travis; Konstantin Volodarsky; Andrew J. Nagengast

Archive | 2002

Locking mechanism for detachably securing a wafer carrier to a conveyor

Glenn W. Travis

Archive | 2002

Method and apparatus for dispensing a fluid media

Glenn W. Travis

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Andrew J. Nagengast

Lam Research

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Anthony S. Meyer

Lam Research

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Erik H. Engdahl

Lam Research

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Michael Labunsky

Lam Research

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Tac Huynh

Lam Research

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Wilbur C. Krusell

Lam Research

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Anil K. Pant

Lam Research

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Ben Mooring

Lam Research

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Christopher Pena

Lam Research

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Damon Vincent Williams

Lam Research

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