Fen F. Jamin | Researchain

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Featured researches published by Fen F. Jamin.

Archive | 2002

Copper recess process with application to selective capping and electroless plating

Shyng-Tsong Chen; Timothy J. Dalton; Kenneth M. Davis; Chao-Kun Hu; Fen F. Jamin; Steffen Kaldor; Mahadevaiyer Krishnan; Kaushik A. Kumar; Michael F. Lofaro; Sandra G. Malhotra; Chandrasekhar Narayan; David L. Rath; Judith M. Rubino; Katherine L. Saenger; Andrew H. Simon; Sean P. E. Smith; Wei-Tsu Tseng

Archive | 2002

OXYNITRIDE SHALLOW TRENCH ISOLATION AND METHOD OF FORMATION

Klaus Dietrich Beyer; Fen F. Jamin; Patrick R. Varekamp

Archive | 2000

System for dispensing polishing liquid during chemical mechanical polishing of a semiconductor wafer

Sumit Pandey; Fen F. Jamin

Archive | 2003

METHODS OF PLANARIZATION

Omer H. Dokumaci; Bruce B. Doris; David V. Horak; Fen F. Jamin

Archive | 1999

Chemical-mechanical polishing system having a bi-material wafer backing film and two-piece wafer carrier

Kenneth M. Davis; Ralph R. Comulada; Fen F. Jamin; Bradley P. Jones; Francis R. Krug; Michael F. Lofaro

Archive | 1998

Composition and method for reducing dishing in patterned metal during CMP process

Chienting Lin; Juin-Fang Wang; Fen F. Jamin

Archive | 2003

BiCMOS integration scheme with raised extrinsic base

Huajie Chen; Seshadri Subbanna; Basanth Jagannathan; G. Freeman; David C. Ahlgren; David Angell; Kathryn T. Schonenberg; Kenneth J. Stein; Fen F. Jamin

Archive | 2003