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Filippos Papadatos

IBM

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Publication

Featured researches published by Filippos Papadatos.

Archive | 2012

Structure and method to make replacement metal gate and contact metal

Zhengwen Li; Michael P. Chudzik; Unoh Kwon; Filippos Papadatos; Andrew H. Simon; Keith Kwong Hon Wong

Archive | 2013

Surface treatment in a dep-etch-dep process

Ruqiang Bao; Domingo A. Ferrer; Filippos Papadatos; Daniel P. Stambaugh

Archive | 2014

METHOD FOR FORMING METAL SEMICONDUCTOR ALLOYS IN CONTACT HOLES AND TRENCHES

Christian Lavoie; Zhengwen Li; Ahmet S. Ozcan; Filippos Papadatos; Chengwen Pei; Jian Yu

Microelectronic Engineering | 2012

Low resistivity tungsten for 32nm node MOL contacts and beyond

Filippos Papadatos; Keith Kwong Hon Wong; Valli Arunachalam; Chung Hwan Shin; Zhengwen Li; Michael P. Chudzik; Woo-Hyeong Lee; Aimin Xing

Archive | 2013

LINER-FREE TUNGSTEN CONTACT

Christian Lavoie; Ahmet S. Ozcan; Filippos Papadatos

Archive | 2011

Elektrisches Bauelement, insbesondere CMOS-Bauelement, und Verfahren zum Herstellen eines Halbleiterbauelements

Andrew H. Simon; Unoh Kwon; Zhengwen Li; Keith Kwong Hon Wong; Filippos Papadatos; Michael P. Chudzik

Archive | 2010

Surface cleaning using sacrificial getter layer

Randolph F. Knarr; Christian Lavoie; Ahmet S. Ozcan; Filippos Papadatos

Archive | 2011

Struktur und Verfahren zum Herstellen eines Ersatzmetall-Gates und Kontaktmetalls

Keith Kwong Hon Wong; Andrew H. Simon; Unoh Kwon; Zhengwen Li; Filippos Papadatos; Michael P. Chudzik

Archive | 2011

Structure and method of manufacturing a replacement metal gate and contact metal

Keith Kwong Hon Wong; Andrew H. Simon; Unoh Kwon; Zhengwen Li; Filippos Papadatos; Michael P. Chudzik

Archive | 2011

Elektrisches Bauelement, insbesondere CMOS-Bauelement, und Verfahren zum Herstellen eines Halbleiterbauelements Electrical component, in particular CMOS device, and method for manufacturing a semiconductor device

Andrew H. Simon; Unoh Kwon; Zhengwen Li; Keith Kwong Hon Wong; Filippos Papadatos; Michael P. Chudzik

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Zhengwen Li

IBM

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Keith Kwong Hon Wong

IBM

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Michael P. Chudzik

IBM

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Andrew H. Simon

IBM

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Unoh Kwon

IBM

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Ahmet S. Ozcan

IBM

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Christian Lavoie

IBM

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Aimin Xing

IBM

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Chengwen Pei

IBM

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Daniel P. Stambaugh

IBM

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