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Severin Waldis

Carl Zeiss AG

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Publication

Featured researches published by Severin Waldis.

Archive | 2014

Optical module for guiding a radiation beam

Markus Hauf; Severin Waldis; Wilfried Noell; Yves Petremend; Marco Jassmann; Lothar Kulzer; Caglar Ataman

Archive | 2009

Illumination optics for euv microlithography and illumination system and projection exposure apparatus comprising an illumination optics of this type

Damian Fiolka; Berndt Warm; Christian Steigerwald; Martin Endres; Ralf Stützle; Jens Ossmann; Ralf Scharnweber; Markus Hauf; Udo Dinger; Severin Waldis; Marc Kirch; Joachim Hartjes

Archive | 2010

Illumination optics for EUV microlithography and related system and apparatus

Damian Fiolka; Berndt Warm; Christian Steigerwald; Martin Endres; Ralf Stuetzle; Jens Ossmann; Ralf Scharnweber; Markus Hauf; Udo Dinger; Severin Waldis; Marc Kirch; Joachim Hartjes

Archive | 2012

Optische Anordnung für eine EUV-Projektionsbelichtungsanlage sowie Verfahren zum Kühlen eines optischen Bauelements

Willi Anderl; Holger Kierey; Markus Bauer; Severin Waldis; András G. Major

Archive | 2013

Device for displacing micromirror in optical module of illumination system, has compensating unit compensating linear displacement of micromirror or predetermined pivot axis during pivoting of micromirror

Johannes Lippert; Matthias Hartmann; Severin Waldis; Yanko Sarov; Adrian Staicu; Benedikt Knauf

Archive | 2011

Optical system for a microlithographic projection apparatus

Ingo Sänger; Ralf Scharnweber; Olaf Dittmann; Toralf Gruner; Gundula Weiss; András G. Major; Martin Vogt; Markus Degünther; Johannes Wangler; Thomas Korb; Severin Waldis

Archive | 2014

Illumination system of a microlithographic projection exposure apparatus having a temperature control device

Florian Bach; Daniel Benz; Severin Waldis; Armin Werber; Berndt Warm

Archive | 2013

Method and component for regulating the tilting of a mirror element

Jan Horn; Lars Berger; Matthias Hartmann; Benedikt Knauf; Matthias Orth; Severin Waldis

Archive | 2010

MIRROR FOR GUIDING A RADIATION BUNDLE

Severin Waldis; Florian Bach; Daniel Benz; Armin Werber; Wilfried Noell; Dirk Heinrich Ehm; Stefan Wiesner; Dieter Kraus

Archive | 2015

Method for regulating the tilting of a mirror element

Jan Horn; Lars Berger; Matthias Hartmann; Benedikt Knauf; Matthias Orth; Severin Waldis

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Collaboration

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András G. Major

Carl Zeiss AG

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Benedikt Knauf

Carl Zeiss AG

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Armin Werber

Carl Zeiss AG

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Florian Bach

Carl Zeiss AG

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Daniel Benz

Carl Zeiss AG

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Markus Bauer

Carl Zeiss AG

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Markus Hauf

Carl Zeiss AG

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Matthias Hartmann

Carl Zeiss AG

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Ralf Scharnweber

Carl Zeiss AG

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Willi Anderl

Carl Zeiss AG

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