Frederick C. Wu
Applied Materials
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Frederick C. Wu.
international interconnect technology conference | 2001
Jeong Soo Byun; Hyoung Chan Ha; Frederick C. Wu; M. Menezes; J. Kopp; V. Nguyen; Avgerinos V. Gelatos; M. Kori
We have performed the defect characterization of Reactive Precleaning (RPC+), an in-Situ precleaning prior to PECVD TiCl/sub 4/-Ti deposition, compared its cleaning efficiency with HF wet cleaning, and evaluated thermal stability of the silicide. RPC+ was found to be a defect free cleaning process, and TiCl/sub 4/-Ti deposition with in-Situ RPC+ results in thicker silicide on the undoped, n/sup +/, and p/sup +/-Si substrate due to the interface cleanliness. It was observed by TEM and XRD that the Ti-silicide with RPC+ has highly textured C49 phase. Finally, RPC+ improves the thermal stability of the silicide.
Archive | 2006
Paul F. Ma; Kavita Shah; Dien-Yeh Wu; Seshadri Ganguli; Christophe Marcadal; Frederick C. Wu; Schubert S. Chu
Archive | 2001
Jeong Soo Byun; Lin Yin; Frederick C. Wu; Ramanujapuram A. Srinivas; Avgerinos V. Gelatos; Alfred Mak; Mei Chang; Moris Kori; Ashok K. Sinha
Archive | 2000
Ramanujapuram A. Srinivas; Brian Metzger; Shulin Wang; Frederick C. Wu
Archive | 2002
Ken K. Lai; Jeong Soo Byun; Frederick C. Wu; Ramanujapuran A. Srinivas; Avgerinos V. Gelatos; Mei Chang; Moris Kori; Ashok K. Sinha; Hua Chung; Hongbin Fang; Alfred Mak; Michael X. Yang; Ming Xi
Archive | 2001
Tong Zhang; Hyoung-Chan Ha; Jeong Soo Byun; Avgerinos V. Gelatos; Frederick C. Wu
Archive | 2006
Paul F. Ma; Kavita Shah; Dien-Yeh Wu; Seshadri Ganguli; Christophe Marcadal; Frederick C. Wu; Schubert S. Chu
Archive | 2006
Timothy W. Weidman; Arulkumar Shanmugasundram; Kapila Wijekoon; Schubert S. Chu; Frederick C. Wu; Kavita Shah
Archive | 1998
Ramanujapuram A. Srinivas; Frederick C. Wu; Anand Vasudev; Mei Chang; Lawrence D. Buckley; Li Wu; Brian Boyle; Shunichi Hizume; Patricia Jennings
Archive | 2006
Schubert S. Chu; Frederick C. Wu; Christophe Marcadal; Seshadri Ganguli; Dien-Yeh Wu; Kavita Shah; Paul F. Ma
