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Dive into the research topics where Gary C. Ettinger is active.

Publication


Featured researches published by Gary C. Ettinger.


Archive | 2007

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

Ho Seon Shin; Gary C. Ettinger; Donald J. K. Olgado; Erik C. Wasinger; Sen-Hou Ko; Charles I. Dodds; Yufei Chen; Wei-Yung Hsu


Archive | 2005

Methods and apparatus for processing a substrate

Erik C. Wasinger; Gary C. Ettinger; Sen-Hou Ko; Wei-Yung Hsu; Liang-Yuh Chen; Ho Seon Shin; Donald J. K. Olgado


Archive | 2000

Method and apparatus for transferring semiconductor substrates using an input module

Gary C. Ettinger; Greg Wiese; Arulkumar Shanmugasundrum


Archive | 2008

Scrubber box and methods for using the same

Joseph Yudovsky; Avi Tepman; Kenneth R. Reynolds; Younes Achkire; Dan Marohl; Steve Ghanayem; Alexander S. Polyak; Gary C. Ettinger; Haochuan Zhang; Hui Chen


Archive | 2008

METHODS AND APPARATUS FOR REMOVAL OF FILMS AND FLAKES FROM THE EDGE OF BOTH SIDES OF A SUBSTRATE USING BACKING PADS

Eashwer Kollata; Shou-sung Chang; Zhenhua Zhang; Paul D. Butterfield; Sen-Hou Ko; Antoine P. Manens; Gary C. Ettinger; Ricardo Martinez


Archive | 2008

METHODS AND APPARATUS FOR POLISHING A NOTCH OF A SUBSTRATE USING A POLISHING PAD

Gary C. Ettinger; Paul D. Butterfield; Antoine P. Manens; Zhenhua Zhang; Eashwer Kollata; Shou-sung Chang


Archive | 2002

Heat activated detachable polishing pad

Gary C. Ettinger


Archive | 2008

METHODS AND APPARATUS FOR SUBSTRATE EDGE POLISHING USING A POLISHING ARM

Gary C. Ettinger; Paul D. Butterfield; Antoine P. Manens


Archive | 2008

METHODS AND APPARATUS FOR USING A ROLLING BACKING PAD FOR SUBSTRATE POLISHING

Eashwer Kollata; Shou-sung Chang; Zhenhua Zhang; Paul D. Butterfield; Sen-Hou Ko; Antoine P. Manens; Gary C. Ettinger; Ricardo Martinez


Archive | 2008

Lid for a semiconductor device processing apparatus and methods for using the same

Joseph Yudovsky; Hui Chen; Gary C. Ettinger

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