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Gary C. Ettinger

Applied Materials

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Publication

Featured researches published by Gary C. Ettinger.

Archive | 2007

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

Ho Seon Shin; Gary C. Ettinger; Donald J. K. Olgado; Erik C. Wasinger; Sen-Hou Ko; Charles I. Dodds; Yufei Chen; Wei-Yung Hsu

Archive | 2005

Methods and apparatus for processing a substrate

Erik C. Wasinger; Gary C. Ettinger; Sen-Hou Ko; Wei-Yung Hsu; Liang-Yuh Chen; Ho Seon Shin; Donald J. K. Olgado

Archive | 2000

Method and apparatus for transferring semiconductor substrates using an input module

Gary C. Ettinger; Greg Wiese; Arulkumar Shanmugasundrum

Archive | 2008

Scrubber box and methods for using the same

Joseph Yudovsky; Avi Tepman; Kenneth R. Reynolds; Younes Achkire; Dan Marohl; Steve Ghanayem; Alexander S. Polyak; Gary C. Ettinger; Haochuan Zhang; Hui Chen

Archive | 2008

METHODS AND APPARATUS FOR REMOVAL OF FILMS AND FLAKES FROM THE EDGE OF BOTH SIDES OF A SUBSTRATE USING BACKING PADS

Eashwer Kollata; Shou-sung Chang; Zhenhua Zhang; Paul D. Butterfield; Sen-Hou Ko; Antoine P. Manens; Gary C. Ettinger; Ricardo Martinez

Archive | 2008

METHODS AND APPARATUS FOR POLISHING A NOTCH OF A SUBSTRATE USING A POLISHING PAD

Gary C. Ettinger; Paul D. Butterfield; Antoine P. Manens; Zhenhua Zhang; Eashwer Kollata; Shou-sung Chang

Archive | 2002

Heat activated detachable polishing pad

Gary C. Ettinger

Archive | 2008

METHODS AND APPARATUS FOR SUBSTRATE EDGE POLISHING USING A POLISHING ARM

Gary C. Ettinger; Paul D. Butterfield; Antoine P. Manens

Archive | 2008

METHODS AND APPARATUS FOR USING A ROLLING BACKING PAD FOR SUBSTRATE POLISHING

Eashwer Kollata; Shou-sung Chang; Zhenhua Zhang; Paul D. Butterfield; Sen-Hou Ko; Antoine P. Manens; Gary C. Ettinger; Ricardo Martinez

Archive | 2008

Lid for a semiconductor device processing apparatus and methods for using the same

Joseph Yudovsky; Hui Chen; Gary C. Ettinger

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Antoine P. Manens

Applied Materials

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Paul D. Butterfield

Applied Materials

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Sen-Hou Ko

Applied Materials

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Eashwer Kollata

Applied Materials

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Ho Seon Shin

Applied Materials

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Shou-sung Chang

Applied Materials

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Joseph Yudovsky

Applied Materials

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Ricardo Martinez

Applied Materials

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Zhenhua Zhang

Applied Materials

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Donald J. K. Olgado

Applied Materials

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