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Dive into the research topics where Paul D. Butterfield is active.

Publication


Featured researches published by Paul D. Butterfield.


Archive | 2003

Conductive polishing article for electrochemical mechanical polishing

Paul D. Butterfield; Liang-Yuh Chen; Yongqi Hu; Antoine P. Manens; Rashid Mavliev; Stan D. Tsai; Feng Q. Liu; Ralph M. Wadensweiler; Lizhong Sun; Siew Neo; Alain Duboust


Archive | 2003

Apparatus for electrochemical processing

Antoine P. Manens; Paul D. Butterfield


Archive | 2002

Method and apparatus for substrate polishing

Ralph M. Wadensweiler; Alain Duboust; Liang-Yuh Chen; Manoocher Birang; Ratson Morad; Paul D. Butterfield


Archive | 2000

Chemical mechanical planarization system

Phillip R. Sommer; Paul D. Butterfield; Joshua T. Oen; Ching-Ling Meng


Archive | 2004

Method and apparatus for electrochemical mechanical processing

Yan Wang; Siew Neo; Feng Liu; Stan D. Tsai; Yongqi Hu; Alain Duboust; Antoine P. Manens; Ralph M. Wadensweiler; Rashid Mavliev; Liang-Yuh Chen; Donald J. K. Olgado; Paul D. Butterfield; Ming-Kuei Tseng; Shou-sung Chang; Lizhong Sun


Archive | 2002

Polishing media stabilizer

Phillip R. Sommer; Paul D. Butterfield


Archive | 2004

Composite pad assembly for electrochemical mechanical processing (ECMP)

Yongqi Hu; Stan D. Tsai; Feng Q. Liu; Liang-Yuh Chen; Ralph M. Wadensweiler; Paul D. Butterfield; Donald J. K. Olgado; Martin S. Wohlert; Sen-Hou Ko; Shou-sung Chang


Archive | 2008

METHODS AND APPARATUS FOR REMOVAL OF FILMS AND FLAKES FROM THE EDGE OF BOTH SIDES OF A SUBSTRATE USING BACKING PADS

Eashwer Kollata; Shou-sung Chang; Zhenhua Zhang; Paul D. Butterfield; Sen-Hou Ko; Antoine P. Manens; Gary C. Ettinger; Ricardo Martinez


Archive | 2008

METHODS AND APPARATUS FOR POLISHING A NOTCH OF A SUBSTRATE USING A POLISHING PAD

Gary C. Ettinger; Paul D. Butterfield; Antoine P. Manens; Zhenhua Zhang; Eashwer Kollata; Shou-sung Chang


Archive | 2008

METHODS AND APPARATUS TO CONTROL SUBSTRATE BEVEL AND EDGE POLISHING PROFILES OF FILMS

Zhenhua Zhang; Paul D. Butterfield; Shou-sung Chang; Eashwer Kollata; Sen-Hou Ko

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