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Damon Vincent Williams

Lam Research

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Publication

Featured researches published by Damon Vincent Williams.

Archive | 2004

Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control

Rodney Kistler; David Hemker; Yehiel Gotkis; Aleksander Owczarz; Bruno Morel; Damon Vincent Williams

Archive | 2003

Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing

Miguel A. Saldana; Damon Vincent Williams

Archive | 2002

Apparatus and methods for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing

Miguel A. Saldana; Damon Vincent Williams

Archive | 2000

Chemical mechanical polishing apparatus and methods with central control of polishing pressure applied by polishing head

Miguel A. Saldana; Damon Vincent Williams

Archive | 2000

Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing head

Miguel A. Saldana; Damon Vincent Williams

Archive | 2003

Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control

Rodney Kistler; David Hemker; Yehiel Gotkis; Aleksander Owczarz; Bruno Morel; Damon Vincent Williams

Archive | 2002

Apparatus and methods for controlling pad conditioning head tilt for chemical mechanical polishing

Damon Vincent Williams

Archive | 2001

Chemical mechanical polishing apparatus and methods with porous vacuum chuck and perforated carrier film

John M. Boyd; Miguel A. Saldana; Damon Vincent Williams

Archive | 2003

Apparatus for controlling retaining ring and wafer head tilt for chemical mechanical polishing

Damon Vincent Williams

Archive | 2002

System for wafer carrier in-process clean and rinse

Damon Vincent Williams; Glenn W. Travis

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Collaboration

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Miguel A. Saldana

Lam Research

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Aleksander Owczarz

Lam Research

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Yehiel Gotkis

Lam Research

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Bruno Morel

Lam Research

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David Hemker

Lam Research

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Rodney Kistler

Lam Research

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David Wei

Lam Research

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Glenn W. Travis

Lam Research

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John M. Boyd

Lam Research

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