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Glenn W. Zubillaga

Applied Materials

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Publication

Featured researches published by Glenn W. Zubillaga.

Archive | 2005

Thermal control system and method

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2006

Method of operating a capacitively coupled plasma reactor with dual temperature control loops

Paul Brillhart; Richard Fovell; Douglas A. Buchberger; Douglas H. Burns; Kallol Bera; Daniel J. Hoffman; Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2006

Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops

Douglas A. Buchberger; Paul Brillhart; Richard Fovell; Hamid Tavassoli; Douglas H. Burns; Kallol Bera; Daniel J. Hoffman; Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2006

Method for agile workpiece temperature control in a plasma reactor using a thermal model

Douglas A. Buchberger; Paul Brillhart; Richard Fovell; Hamid Tavassoli; Douglas H. Burns; Kallol Bera; Daniel J. Hoffman; Kenneth W. Cowans; Williams W. Cowans; Glenn W. Zubillaga; Isaac Millian

Archive | 1998

Systems and methods for capacity regulation of refrigeration systems

Kenneth W. Cowans; Glenn W. Zubillaga

Archive | 2005

Heat exchanger and temperature control unit

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga

Archive | 2011

Thermal control method and system for the same

Kenneth W. Cowans; William W. Cowans; Isaac Millan; Glenn W. Zubillaga; アイザック・ミラン; ウィリアム・ダブリュー・コワンズ; グレン・ダブリュー・ズビラガ; ケネス・ダブリュー・コワンズ

Archive | 2008

Wärmesteuersystem und -verfahren

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga

Archive | 2008

Système et procédé de commande thermique

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga

Archive | 2008

Système de commande thermique

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga

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Collaboration

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William W. Cowans

Applied Materials

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Isaac Millan

Applied Materials

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Daniel J. Hoffman

Applied Materials

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Douglas A. Buchberger

Applied Materials

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Douglas H. Burns

Applied Materials

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Kallol Bera

Applied Materials

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Kenneth W. Cowans

Wellington Management Company

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Paul Brillhart

Applied Materials

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Richard Fovell

Applied Materials

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Hamid Tavassoli

Applied Materials

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