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Isaac Millan

Applied Materials

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Publication

Featured researches published by Isaac Millan.

Archive | 2005

Thermal control system and method

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2006

Method of operating a capacitively coupled plasma reactor with dual temperature control loops

Paul Brillhart; Richard Fovell; Douglas A. Buchberger; Douglas H. Burns; Kallol Bera; Daniel J. Hoffman; Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2006

Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops

Douglas A. Buchberger; Paul Brillhart; Richard Fovell; Hamid Tavassoli; Douglas H. Burns; Kallol Bera; Daniel J. Hoffman; Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2011

Thermal control method and system for the same

Kenneth W. Cowans; William W. Cowans; Isaac Millan; Glenn W. Zubillaga; アイザック・ミラン; ウィリアム・ダブリュー・コワンズ; グレン・ダブリュー・ズビラガ; ケネス・ダブリュー・コワンズ

Archive | 2005

Verfahren zur Regelung der Temperatur einer Wärmebelastung

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2005

System zur Regelung der Temperatur in einer Verarbeitungseinheit System for controlling the temperature in a processing unit

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2005

Wärmeregelungsgerät Thermal control device

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2005

Wärmesteuersystem und -verfahren Thermal control system and method

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2005

A method of controlling the temperature of a thermal load

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

Archive | 2005

A thermal control unit

Kenneth W. Cowans; William W. Cowans; Glenn W. Zubillaga; Isaac Millan

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Collaboration

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Glenn W. Zubillaga

Applied Materials

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William W. Cowans

Applied Materials

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Daniel J. Hoffman

Applied Materials

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Douglas A. Buchberger

Applied Materials

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Douglas H. Burns

Applied Materials

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Kallol Bera

Applied Materials

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Kenneth W. Cowans

Wellington Management Company

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Paul Brillhart

Applied Materials

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Richard Fovell

Applied Materials

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Hamid Tavassoli

Applied Materials

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