Sivakumar Dhandapani
Applied Materials
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Publication
Featured researches published by Sivakumar Dhandapani.
advanced semiconductor manufacturing conference | 2010
Gregory E. Menk; Sivakumar Dhandapani; Charles C. Garretson; Shou-sung Chang; Jason Garcheung Fung; Stan D. Tsai
A new pad conditioning arm design enables the use of closed-loop control (CLC) to improve conditioning performance throughout the life of a pad and disk pair. Measured pad conditioner torque is used to monitor and control the conditioning and polish processes in situ and in real time. The CLC system maintains process performance throughout pad life by adjusting the conditioner down force to compensate for process drift, such as the loss of diamond aggressiveness as the disk ages.
Archive | 2010
Jun Qian; Charles C. Garretson; Sivakumar Dhandapani; Jeffrey Drue David; Harry Q. Lee
Archive | 2009
Jun Qian; Sivakumar Dhandapani; Harry Q. Lee; Thomas H. Osterheld; Zhize Zhu
Archive | 2011
Sivakumar Dhandapani; Jun Qian; Christopher D. Cocca; Jason Garcheung Fung; Shou-sung Chang; Charles C. Garretson; Gregory E. Menk; Stan D. Tsai
Archive | 2009
Sivakumar Dhandapani; Stan D. Tsai; Daxin Mao; Sameer Deshpande; Shou-sung Chang; Gregory E. Menk; Charles C. Garretson; Jason Garcheung Fung; Christopher D. Cocca; Hung Chih Chen
Archive | 2011
Sivakumar Dhandapani; Asheesh Jain; Charles C. Garretson; Gregory E. Menk; Stan D. Tsai
Archive | 2011
Sivakumar Dhandapani; Gregory E. Menk; Sang J. Cho; Jason Garcheung Fung; Christopher D. Cocca; Stan D. Tsai; Shou-sung Chang; Charles C. Garretson
Archive | 2010
Jun Qian; Boguslaw A. Swedek; Harry Q. Lee; Jeffrey Drue David; Sivakumar Dhandapani; Thomas H. Osterheld
Archive | 2012
Jeffrey Drue David; Boguslaw A. Swedek; Dominic J. Benvegnu; Sivakumar Dhandapani
Archive | 2011
Gregory E. Menk; Stan D. Tsai; Sang J. Cho; Sivakumar Dhandapani
