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Hiromi Yajima

Toshiba

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Publication

Featured researches published by Hiromi Yajima.

Archive | 1993

Method for planarizing a semiconductor device having a amorphous layer

Masako Kodera; Hiroyuki Yano; Atsushi Shigeta; Riichirou Aoki; Hiromi Yajima; Haruo Okano

Archive | 1997

Polishing apparatus and method for planarizing layer on a semiconductor wafer

Masako Kodera; Hiroyuki Yano; Atsushi Shigeta; Riichirou Aoki; Hiromi Yajima; Haruo Okano

Archive | 1995

Method for planarizing a semiconductor body by CMP method and an apparatus for manufacturing a semiconductor device using the method

Masako Kodera; Atsushi Shigeta; Shiro Mishima; Hiromi Yajima; Riichirou Aoki

Archive | 2001

Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device

Katsuya Okumura; Riichirou Aoki; Hiromi Yajima; Seiji Ishikawa; Manabu Tsujimura

Archive | 1995

Semiconductor planarizing apparatus

Masako Kodera; Hiroyuki Yano; Atsushi Shigeta; Riichirou Aoki; Hiromi Yajima; Haruo Okano

Archive | 2002

Semiconductor manufacturing device, its controller, its part controller, and semiconductor wafer housing container transfer device

Kenji Nakada; Tatsumi Suganuma; Hiromi Yajima; Noriaki Yoshikawa; Tadashi Yotsumoto

Archive | 2003

Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus

Hiromi Yajima; Tatsumi Suganuma; Noriaki Yoshikawa; Tadashi Yotsumoto; Kenji Nakata

Archive | 2001

Apparatus for conveying a workpiece

Toshiro Maekawa; Satomi Hamada; Riichiro Aoki; Shoichi Kodama; Hiromi Yajima

Archive | 1993

Semiconductor device, manufacture thereof, polishing method, polishing apparatus and recovering method of polished surface of the same apparatus

Riichiro Aoki; Masako Kodera; Atsushi Shigeta; Hiromi Yajima; Hiroyuki Yano; 雅子 小寺; 比呂海 矢島; 博之 矢野; 厚 重田; 利一郎 青木

Archive | 2002

Polishing apparatus and a method of polishing and cleaning and drying a wafer

Toyomi Nishi; Tetsuji Togawa; Harumitsu Saito; Manabu Tsujimura; Hiromi Yajima; Kazuaki Himukai; Shoichi Kodama; Yukio Imoto; Riichiro Aoki; Masako Watase; Atsushi Shigeta; Shiro Mishima; Gisuke Kouno

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Atsushi Shigeta

Ebara Corporation

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Masako Kodera

Toshiba

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Riichirou Aoki

Toshiba

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Hiroyuki Yano

Toshiba

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Riichiro Aoki

Ebara Corporation

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Haruo Okano

Toshiba

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Shiro Mishima

Toshiba

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Manabu Tsujimura

Ebara Corporation

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Shoichi Kodama

Ebara Corporation

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Gisuke Kouno

Ebara Corporation

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