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Riichirou Aoki

Toshiba

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Publication

Featured researches published by Riichirou Aoki.

Archive | 1993

Method of manufacturing silicon oxide film containing fluorine

Yukio Nishiyama; Rempei Nakata; Nobuo Hayasaka; Haruo Okano; Riichirou Aoki; Takahito Nagamatsu; Akemi Satoh; Masao Toyosaki; Hitoshi Ito

Archive | 1993

Method for planarizing a semiconductor device having a amorphous layer

Masako Kodera; Hiroyuki Yano; Atsushi Shigeta; Riichirou Aoki; Hiromi Yajima; Haruo Okano

Archive | 1997

Polishing apparatus and method for planarizing layer on a semiconductor wafer

Masako Kodera; Hiroyuki Yano; Atsushi Shigeta; Riichirou Aoki; Hiromi Yajima; Haruo Okano

Archive | 1995

Method for forming silicon oxide on a semiconductor

Naruhiko Kaji; Riichirou Aoki; Hiroyuki Toyama; Hidemitsu Egawa; Takamitsu Yoshida; Yukio Nishiyama

Archive | 1995

Method for planarizing a semiconductor body by CMP method and an apparatus for manufacturing a semiconductor device using the method

Masako Kodera; Atsushi Shigeta; Shiro Mishima; Hiromi Yajima; Riichirou Aoki

Archive | 2001

Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device

Katsuya Okumura; Riichirou Aoki; Hiromi Yajima; Seiji Ishikawa; Manabu Tsujimura

Archive | 1995

Semiconductor planarizing apparatus

Masako Kodera; Hiroyuki Yano; Atsushi Shigeta; Riichirou Aoki; Hiromi Yajima; Haruo Okano

Archive | 1988

Interconnection structure of a semiconductor device and method of manufacturing the same

Katsuya Okumura; Toshinori Shinki; Toshiaki Idaka; Riichirou Aoki

Archive | 1989

Semiconductor device having a backplate electrode

Hidemitsu Egawa; Riichirou Aoki; Katsuya Okumura

Archive | 1987

Process for manufacturing a semiconductor device having a protective layer.

Atsumu Tezaki; Riichirou Aoki; Katsuya Okumura

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Katsuya Okumura

Toshiba

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Atsushi Shigeta

Ebara Corporation

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Hiromi Yajima

Toshiba

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Masako Kodera

Toshiba

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Hiroyuki Yano

Toshiba

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Haruo Okano

Toshiba

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Toshiaki Idaka

Toshiba

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Toshinori Shinki

Toshiba

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Hidemitsu Egawa

Toshiba

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Masayoshi Hirose

Ebara Corporation

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