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Ilya Lavitsky

Applied Materials

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Publication

Featured researches published by Ilya Lavitsky.

Archive | 2002

Unitary removable shield assembly

Alan B. Liu; Ilya Lavitsky; Michael Rosenstein

Archive | 2004

Support ring assembly

Keith A. Miller; Ilya Lavitsky

Archive | 2004

Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith

Tza-Jing Gung; Xianmin Tang; John C. Forster; Peijun Ding; Marc O. Schweitzer; Keith A. Miller; Ilya Lavitsky

Archive | 2005

Shields usable with an inductively coupled plasma reactor

Tza-Jing Gung; Xianmin Tang; John C. Forster; Peijun Ding; Marc O. Schweitzer; Keith A. Miller; Ilya Lavitsky

Archive | 2004

Motorized chamber lid

Michael Rosenstein; Alex Shenderovich; Marc O. Schweitzer; Ilya Lavitsky; Alvin Lau; Michael Feltsman

Archive | 2005

Physical vapor deposition chamber having an adjustable target

Ilya Lavitsky; Michael Rosenstein; Goichi Yoshidome; Hougong Wang; Zhendong Liu; Mengqi Ye

Archive | 2006

Flexible magnetron including partial rolling support and centering pins

Makoto Inagawa; Akihiro Hosokawa; Hien-Minh Huu Le; Ilya Lavitsky; John M. White; Todd W. Martin; Bradley O. Stimson

Archive | 2005

Physical vapor deposition chamber having a rotatable substrate pedestal

Ilya Lavitsky; Michael Rosenstein; Goichi Yoshidome; Hougong Wang; Zhendong Liu; Mengqi Ye

Archive | 2012

EDGE RING LIP

Joseph M. Ranish; Wolfgang Aderhold; Blake Koelmel; Ilya Lavitsky

Archive | 2002

Cleanroom lift having an articulated arm

Ilya Lavitsky; Michael Rosenstein

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Collaboration

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Keith A. Miller

Applied Materials

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Marc O. Schweitzer

Applied Materials

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Michael Rosenstein

Applied Materials

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John C. Forster

Applied Materials

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Peijun Ding

Applied Materials

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Tza-Jing Gung

Applied Materials

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Xianmin Tang

Applied Materials

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Blake Koelmel

Applied Materials

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Goichi Yoshidome

Applied Materials

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Hougong Wang

Applied Materials

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