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Ingo Saenger

Carl Zeiss AG

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Publication

Featured researches published by Ingo Saenger.

Archive | 2013

Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method

Ingo Saenger; Joerg Zimmermann; Johannes Ruoff; Martin Meier; Frank Schlesener; Christoph Hennerkes

Archive | 2013

OPTICAL SYSTEM, IN PARTICULAR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Ingo Saenger

Archive | 2015

METHOD OF LITHOGRAPHICALLY TRANSFERRING A PATTERN ON A LIGHT SENSITIVE SURFACE AND ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Frank Schlesener; Ingo Saenger; Olaf Dittmann; Aksel Goehnermeier; Alexandra Pazidis; Thomas Schicketanz; Michael Patra; Markus Deguenther

Archive | 2014

METHOD AND APPARATUS FOR COMPENSATING AT LEAST ONE DEFECT OF AN OPTICAL SYSTEM

Vladimir Dmitriev; Ingo Saenger; Frank Schlesener; Markus Mengel; Johannes Ruoff

Archive | 2015

EUV LIGHT SOURCE FOR GENERATING A USED OUTPUT BEAM FOR A PROJECTION EXPOSURE APPARATUS

Ingo Saenger

Archive | 2015

ILLUMINATION SYSTEM FOR AN EUV LITHOGRAPHY DEVICE AND FACET MIRROR THEREFOR

Johannes Ruoff; Ingo Saenger; Joerg Zimmermann; Daniel Kraehmer; Christoph Hennerkes; Frank Schlesener

Archive | 2014

MIRROR SYSTEM COMPRISING AT LEAST ONE MIRROR FOR USE FOR GUIDING ILLUMINATION AND IMAGING LIGHT IN EUV PROJECTION LITHOGRAPHY

Ingo Saenger; Frank Schlesener

Archive | 2014

ILLUMINATION OPTICAL UNIT FOR A PROJECTION EXPOSURE APPARATUS

Ingo Saenger

Archive | 2014

APPARATUS AND METHOD FOR COMPENSATING A DEFECT OF A CHANNEL OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM

Ingo Saenger; Frank Schlesener

Archive | 2013

POLARIZATION-INFLUENCING OPTICAL ARRANGEMENT, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Ingo Saenger; Frank Schlesener

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Collaboration

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Frank Schlesener

Carl Zeiss AG

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Joerg Zimmermann

Carl Zeiss AG

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Christoph Hennerkes

Carl Zeiss AG

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Johannes Ruoff

Carl Zeiss AG

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Daniel Kraehmer

Carl Zeiss AG

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Olaf Dittmann

Carl Zeiss AG

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Aksel Goehnermeier

Carl Zeiss AG

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Alexandra Pazidis

Carl Zeiss AG

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Bastian Trauter

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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