Irene McStay | Researchain

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Featured researches published by Irene McStay.

Archive | 2000

Negative Ion implant mask formation for self-aligned, sublithographic resolution patterning for single-sided vertical device formation

Rama Divakaruni; Stephan Kudelka; Helmut Tews; Irene McStay; K. Y. Lee; Uwe Schroeder

Archive | 2001

Process flow for capacitance enhancement in a DRAM trench

Michael P. Chudzik; Johnathan E. Faltermeier; Rajarao Jammy; Stephan Kudelka; Irene McStay; Kenneth T. Settlemyer; Helmut Tews

Archive | 2000

Method of forming self-limiting polysilicon LOCOS for DRAM cell

Ramachandra Divakaruni; Jack A. Mandelman; Irene McStay; Larry Alan Nesbit; Carl J. Radens; Helmut Tews

Archive | 2003

SACRIFICIAL COLLAR METHOD FOR IMPROVED DEEP TRENCH PROCESSING

Michael P. Chudzik; Irene McStay; Helmut Tews; Porshia Shane Wrschka

Archive | 2001

Method for surface area enhancement of capacitors by film growth and self masking

Rajarao Jammy; Irene McStay; Byeongju Park; Joseph F. Shepard; Helmut Tews

Archive | 2002

Low resistivity deep trench fill for DRAM and EDRAM applications

Uwe Schroeder; Helmut Tews; Irene McStay; Manfred Hauf; Matthias Goldbach; Bernhard Sell; Harald Seidl; Dirk Schumann; Rajarao Jammy; Joseph F. Shepard; Jean-Marc Rousseau

Archive | 2003

Nitride and polysilicon interface with titanium layer

Ronald Joseph Schutz; Werner Robl; Rajeev Malik; Lawrence A. Clevenger; Oleg Gluschenkov; Cyril Cabral; Roy C. Iggulden; Yun-Yu Wang; Keith Kwong Hon Wong; Irene McStay

Archive | 2002