James K. Howey | Researchain

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Archive | 2001

Gas discharge laser with improved beam path

William N. Partlo; Richard L. Sandstrom; Holzer K. Glatzel; Raymond F. Cybulski; Peter C. Newman; James K. Howey; William G. Hulburd; John T. Melchior; Alex P. Ivaschenko

Archive | 2000

Extreme repetition rate gas discharge laser

I. Roger Oliver; William N. Partlo; Richard M. Ness; Richard L. Sandstrom; Stuart L. Anderson; Alex P. Ivaschenko; James K. Howey; Vladimir Kulgeyko; Jean-Marc Hueber; Daniel L. Birx

Archive | 1998

Gas laser chamber/optics support structure

Xiaojiang J. Pan; James K. Howey; Curtiss Lynn Mixon

Archive | 1999

Soldered fan assembly for electric discharge laser

Thomas Hofmann; James K. Howey; Robert A. Shannon; Richard C. Ujazdowski

Archive | 1999

Tangential fan with cutoff assembly and vibration control for electric discharge laser

Thomas Hofmann; James K. Howey; Robert A. Shannon; Richard C. Ujazdowski; Tom A. Watson; R. Kyle Webb

Archive | 2004

DUV light source optical element improvements

Richard L. Sandstrom; John M Algots; Joshua C. Brown; Raymond F. Cybulski; John Dunlop; James K. Howey; Richard G. Morton; Xiaojiang Pan; William N. Partlo; Firas F. Putris; Tom A. Watson; Thomas A. Yager

Archive | 1998