Jeffrey A. Shields
Advanced Micro Devices
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Publication
Featured researches published by Jeffrey A. Shields.
international symposium on semiconductor manufacturing | 1999
Jeffrey A. Shields; Kelwin Ko; R. Rios; L. Mercado
Metal mask rework has been demonstrated to have a dramatic effect on product yield. We have undertaken an exhaustive study to determine the mechanisms behind the yield loss and to develop a benign metal mask rework solution. We have identified two separate mechanisms for potential yield loss associated with metal mask rework; copper precipitation from high temperature plasma strip and chemical penetration of thin TiN ARC layers.
Archive | 1999
Jeffrey A. Shields; Ramkumar Subramanian; Bharath Rangarajan
Archive | 1998
Robert C. Chen; Jeffrey A. Shields; Robert Dawson; Khanh Tran
Archive | 2002
Arvind Halliyal; Tazrien Kamal; Minh Van Ngo; Mark T. Ramsbey; Jeffrey A. Shields; Jean Y. Yang; Emmanuil H. Lingunis; Angela T. Hui; Jusuke Ogura
Archive | 2004
Minh Van Ngo; Tazrien Kamal; Mark T. Ramsbey; Arvind Halliyal; Jaeyong Park; Ning Cheng; Jeff P. Erhardt; Clarence Ferguson; Jeffrey A. Shields; Angela T. Hui; Robert A. Huertas; Tyagamohan Gottipati
Archive | 2001
Uzodinma Okoroanyanwu; Chih-Yuh Yang; Jeffrey A. Shields
Archive | 1999
Jeffrey A. Shields; Bharath Rangarajan
Archive | 2000
Allen S. Yu; Jeffrey A. Shields
Archive | 2002
Tazrien Kamal; Minh Van Ngo; Mark T. Ramsbey; Jeffrey A. Shields; Jean Y. Yang; Emmanuil H. Lingunis; Hidehiko Shiraiwa; Angela T. Hui
Archive | 1999
Jeffrey A. Shields; Khanh Tran; Robert C. Chen; Robert Dawson
