Is this you? Create Your Porfile
Avatar

Robert C. Chen

Advanced Micro Devices

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Robert C. Chen is active.

Explore More

Publication

Featured researches published by Robert C. Chen.

Archive | 1998

Manufacturing capping layer for the fabrication of cobalt salicide structures

Paul R. Besser; Robin W. Cheung; Robert C. Chen

Archive | 1998

Borderless vias with HSQ gap filled patterned metal layers

Robert C. Chen; Jeffrey A. Shields; Robert Dawson; Khanh Tran

Archive | 1999

BORDERLESS VIAS WITH CVD BARRIER LAYER

Robert C. Chen; David Greenlaw; John A. Iacoponi

Archive | 1999

HSQ with high plasma etching resistance surface for borderless vias

Jeffrey A. Shields; Khanh Tran; Robert C. Chen; Robert Dawson

Archive | 1998

Punch-through via with conformal barrier liner

Robert C. Chen; Jeffrey A. Shields; Robert Dawson; Khanh Tran

Archive | 1999

Cobalt silicidation using tungsten nitride capping layer

Takeshi Nogami; Robert C. Chen; Guarionex Morales

Archive | 1997

Method of prevention of degradation of low dielectric constant gap-fill material

Robert C. Chen; Jeffrey A. Shields; Robert Dawson; Khanh Tran

Archive | 1997

Tapered isolated metal profile to reduce dielectric layer cracking

Robert C. Chen; Jeffrey A. Shields; Khanh Tran

Archive | 1998

H2 diffusion barrier formation by nitrogen incorporation in oxide layer

Robert C. Chen; Jeffrey A. Shields; Robert Dawson; Khanh Tran

Archive | 1998

A process for the manufacture of HSQ layers and limitless vias with patterned metal layers wherein the openings are filled with HSQ

Robert C. Chen; Jeffrey A. Shields; Robert Dawson; Khanh Tran

Explore More

Collaboration

Dive into the Robert C. Chen's collaboration.

Top Co-Authors
Avatar

Jeffrey A. Shields

Advanced Micro Devices

View shared research outputs
Top Co-Authors
Avatar

Khanh Tran

Advanced Micro Devices

View shared research outputs
Top Co-Authors
Avatar

Robert Dawson

Advanced Micro Devices

View shared research outputs
Top Co-Authors
Avatar

David Greenlaw

Advanced Micro Devices

View shared research outputs
Top Co-Authors
Avatar

Guarionex Morales

Advanced Micro Devices

View shared research outputs
Top Co-Authors
Avatar

John A. Iacoponi

Advanced Micro Devices

View shared research outputs
Top Co-Authors
Avatar

Robin W. Cheung

Advanced Micro Devices

View shared research outputs
Top Co-Authors
Avatar

Takeshi Nogami

Advanced Micro Devices

View shared research outputs
Top Co-Authors
Avatar

Paul R. Besser

GlobalFoundries

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge