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Jeffrey Tobin

Applied Materials

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Featured researches published by Jeffrey Tobin.

Archive | 2007

ATOMIC LAYER DEPOSITION CHAMBER AND COMPONENTS

Dien-Yeh Wu; Schubert S. Chu; Paul F. Ma; Jeffrey Tobin

Archive | 2011

INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CONCENTRATOR

Canfeng Lai; Jeffrey Tobin; Peter I. Porshnev; Jose Antonio Marin

Archive | 2010

METHODS FOR DETERMINING THE QUANTITY OF PRECURSOR IN AN AMPOULE

Joseph Yudovsky; Jeffrey Tobin; Patricia M. Liu; Faruk Gungor; Tai T. Ngo; Travis Tesch; Kenric Choi

Archive | 2014

Method and apparatus for precleaning a substrate surface prior to epitaxial growth

Christopher S. Olsen; Theresa Kramer Guarini; Jeffrey Tobin; Lara Hawrylchak; Peter Stone; Chi Wei Lo; Saurabh Chopra

Archive | 2013

Minimal contact edge ring for rapid thermal processing

Sairaju Tallavarjula; Kevin Joseph Bautista; Jeffrey Tobin

Archive | 2013

Methods and apparatus for processing substrates using an ion shield

Jeffrey Tobin; Bernard L. Hwang; Canfeng Lai; Lara Hawrylchak; Wei Liu; Johanes Swenberg

Archive | 2014

Support cylinder for thermal processing chamber

Mehran Behdjat; Aaron Muir Hunter; Joseph M. Ranish; Norman L. Tam; Jeffrey Tobin; Jiping Li; Martin Tran

Archive | 2012

METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRATE PROCESSING SYSTEMS

Canfeng Lai; David Eugene Aberle; Michael P. Kamp; Henry Barandica; Martin A. Hilkene; Matthew D. Scotney-Castle; Jeffrey Tobin; Douglas H. Burns; Lara Hawrylchak; Peter I. Porshnev

Archive | 2015

Substrate transfer mechanisms

Masato Ishii; Mehmet Tugrul Samir; Shu-Kwan Lau; Jeffrey Tobin

Archive | 2017

SUPPORT CYLINDER FOR THERMAL PROCESSING CYLINDER

Mehran Behdjat; Aaron Muir Hunter; Joseph M. Ranish; Norman L. Tam; Jeffrey Tobin; Li Jiping; Martin Tran

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Canfeng Lai

Applied Materials

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Lara Hawrylchak

Applied Materials

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Aaron Muir Hunter

Applied Materials

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Joseph M. Ranish

Applied Materials

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Martin Tran

Applied Materials

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Mehran Behdjat

Applied Materials

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Norman L. Tam

Applied Materials

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Peter I. Porshnev

Applied Materials

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Schubert S. Chu

Applied Materials

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Bernard L. Hwang

Applied Materials

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