Jens Reichelt
Qimonda
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Publication
Featured researches published by Jens Reichelt.
Proceedings of SPIE, the International Society for Optical Engineering | 2007
Rainer Pforr; Mario Hennig; Jens Reichelt; Guy Ben Zvi; Martin Sczyrba
Intra-field CD variation is a main contributor to the total CD variation budget in IC manufacturing. It is essentially caused by mask CD variations and imperfections of the exposure tool. Techniques to reduce the IF CD error will be introduced. Tool and mask based CDU improvement techniques will be compared. Their CDU improvement potential and their correction accuracy will be analyzed. The correction methodology will be discussed, specifically none-wafer based CD measurement techniques as correction data input. Implementation efforts of the techniques will be compared.
Archive | 2006
Eric Cotte; Mario Hennig; Rainer Pforr; Jens Reichelt; Martin Sczyrba
Archive | 2007
Rainer Pforr; Thorsten Winkler; Ralf Ziebold; Wolfram Kostler; Jens Reichelt; Stefan Blawid; Sebastian Champigny; Manuel Vorwerk
Storage and Retrieval for Image and Video Databases | 2006
Karsten Bubke; Martin Sczyrba; Kyi Tae Park; Ralf Neubauer; Rainer Pforr; Jens Reichelt; Ralf Ziebold
Archive | 2006
Rainer Pforr; Mario Hennig; Jens Reichelt; Thomas Muelders
Archive | 2006
Rainer Pforr; Jens Reichelt; Mario Hennig; Thomas Mülders; Karsten Zeiler
Archive | 2007
Mario Hennig; Rainer Pforr; Jens Reichelt
Archive | 2008
Mario Hennig; Thomas Muelders; Rainer Pforr; Jens Reichelt
Archive | 2006
Mario Hennig; Thomas Mülders; Rainer Pforr; Jens Reichelt; Karsten Zeiler
Archive | 2006
Mario Hennig; Thomas Mülders; Rainer Pforr; Jens Reichelt; Karsten Zeiler
