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Joern Luetzen

Infineon Technologies

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Publication

Featured researches published by Joern Luetzen.

Archive | 2002

Method for fabricating a trench structure

Albert Birner; Matthias Goldbach; Joern Luetzen

Archive | 2002

Method for fabricating a vertical transistor in a trench, and vertical transistor

Albert Birner; Joern Luetzen

Archive | 2004

Method for forming an SOI substrate, vertical transistor and memory cell with vertical transistor

Albert Birner; Steffen Breuer; Matthias Goldbach; Joern Luetzen; Dirk Schumann

Archive | 2005

Method for producing a dielectric and semiconductor structure

Albert Birner; Andreas Weber; Till Schloesser; Joern Luetzen

Archive | 2002

Verfahren zur herstellung von grabenkondensatoren für integrierte halbleiterspeicher

Matthias Goldbach; Andreas Orth; Joern Luetzen

Archive | 2000

Integrated circuit used in DRAMs and SDRAMs comprises a switching element formed in a substrate, a further switching element buried in the substrate, and an insulating layer lying between the elements and locally limited in the substrate

Joern Luetzen; Bernhard Sell

Archive | 2001

Semiconductor memory and production process has memory cells having vertical select transistors and conductive bridges to trenched word lines

Bernd Goebel; Werner Steinhoegl; Alfred Kersch; Martin Gutsche; Harald Seidl; Joern Luetzen; Martin Popp; Dirk Schumann

Archive | 2002

Production of a trench capacitor for a semiconductor memory cell comprises forming a trench in a substrate using a hard mask, forming a capacitor dielectric, insulating collar and conducting filler in trench regions, and further processing

Lars Heineck; Stephan Kudelka; Joern Luetzen; Hans-Peter Moll; Martin Popp; Till Schloesser; Johann Steinmetz

Archive | 2002

Method for the production of trench capacitors for integrated semiconductor memories

Matthias Goldbach; Andreas Orth; Joern Luetzen

Archive | 2004

Method for fabricating a semiconductor structure having a trench, in a particular for use in the fabrication of a trench capacitor

Birner Albert; Goldbach Matthias; Hecht Thomas; Heineck Lars; Kudelka Stephan; Joern Luetzen; Dirk Manger; Andreas Orth

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Collaboration

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Albert Birner

Infineon Technologies

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Matthias Goldbach

Infineon Technologies

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Dirk Schumann

Infineon Technologies

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Harald Seidl

Infineon Technologies

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Stephan Kudelka

Qimonda

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Martin Popp

Infineon Technologies

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Rolf Weis

Infineon Technologies

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Bernd Goebel

Infineon Technologies

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Helmut Dr. Tews

Infineon Technologies

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Martin Franosch

Infineon Technologies

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