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Juergen Boemmels

Advanced Micro Devices

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Publication

Featured researches published by Juergen Boemmels.

Archive | 2009

Method for patterning a metallization layer by reducing resist strip induced damage of the dielectric material

Frank Feustel; Thomas Werner; Juergen Boemmels

Archive | 2008

Sidewall protection layer

Juergen Boemmels; Frank Feustel; Ralf Richter

Archive | 2009

REDUCING METAL VOIDS IN A METALLIZATION LAYER STACK OF A SEMICONDUCTOR DEVICE BY PROVIDING A DIELECTRIC BARRIER LAYER

Holger Schuehrer; Juergen Boemmels

Archive | 2008

SEMICONDUCTOR DEVICE INCLUDING FIELD EFFECT TRANSISTORS LATERALLY ENCLOSED BY INTERLAYER DIELECTRIC MATERIAL HAVING INCREASED INTRINSIC STRESS

Ralf Richter; Carsten Peters; Juergen Boemmels

Archive | 2010

Veringern von Metallhohlräumen in einem metallischen Schichtstapel eines Halbleiterbauelements durch Vorsehen einer dielektrischen Barrierenschicht

Holger Schuehrer; Juergen Boemmels

Archive | 2009

Halbleiterbauelement und Verfahren zum Strukturieren von vertikalen Kontakten und Metallleitungen in einem gemeinsamen Ätzprozess

Ralf Richter; Robert Seidel; Juergen Boemmels; Thomas Foltyn

Archive | 2009

Reducing leakage in dielectric materials including metal regions including a metal cap layer in semiconductor devices

Axel Preusse; Markus Nopper; Thomas Ortleb; Juergen Boemmels

Archive | 2008

Reduzierung der Leckströme in dielektrischen Materialien mit Metallgebieten und einer Metalldeckschicht in Halbleiterbauelementen

Axel Preusse; Markus Nopper; Thomas Ortleb; Juergen Boemmels

Archive | 2008

Veringern von Metallhohlräumen in einem metallischen Schichtstapel eines Halbleiterbauelements durch Vorsehen einer dielektrischen Barrierenschicht REDUCE of metal voids in a metal layer stack of a semiconductor device by providing a dielectric barrier layer

Juergen Boemmels; Holger Schuehrer

Archive | 2007

Method for manufacturing semiconductor components with field-effect transistors, involves forming stress inducing dielectric layer over multiple p-channel transistors

Juergen Boemmels; Carsten Peters; Ralf Richter

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Collaboration

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Ralf Richter

Advanced Micro Devices

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Holger Schuehrer

Advanced Micro Devices

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Axel Preusse

Advanced Micro Devices

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Carsten Peters

Advanced Micro Devices

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Frank Feustel

Advanced Micro Devices

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Markus Nopper

Advanced Micro Devices

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Thomas Ortleb

Advanced Micro Devices

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Matthias Lehr

Advanced Micro Devices

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Thomas Foltyn

Advanced Micro Devices

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Thomas Werner

Advanced Micro Devices

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