Katsuaki Natori
Toshiba
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Publication
Featured researches published by Katsuaki Natori.
Integrated Ferroelectrics | 2001
Koji Yamakawa; Osamu Arisumi; Keitaro Imai; Katsuaki Natori; Hiroyuki Kanaya; Iwao Kunishima; Tsunetoshi Arikado
Abstract Reliable PZT capacitors have been developed by using stable PZT sputtering technique and Pt/thinSRO(SrRuO3) stack electrodes. Introduction of SRO electrodes with no leakage current degradation is a key to realize reliable and scalable PZT capacitors. Roles of top electrode (TE) SRO and bottom electrode (BE) SRO were investigated respectively from reliability and process damage points of view. The SRO works as hydrogen resistant electrodes, fatigue free interfaces and nucleation sites for perovskite formation. Relationship between SRO crystallinity and PZT electrical properties was elucidated. Templates made of thin SRO were found to function as barrier layers against diffusion of Pb and Ru from BE resulting in new possible cell structures.
Archive | 1993
Kazuhiro Eguchi; Katsuaki Natori
Archive | 2011
Katsuaki Natori; Koji Yamakawa; Daisuke Ikeno
Archive | 2011
Daisuke Ikeno; Koji Yamakawa; Katsuaki Natori; Yasuyuki Sonoda
Archive | 2013
Koji Yamakawa; Katsuaki Natori; Daisuke Ikeno
Archive | 2007
Ichiro Mizushima; Kiyotaka Miyano; Katsuaki Natori; Yoshio Ozawa
Archive | 2005
Katsuaki Natori; Keisuke Nakazawa; Koji Yamakawa; Hiroyuki Kanaya; Yoshinori Kumura; Hiroshi Itokawa; Osamu Arisumi
Archive | 2010
Katsuyuki Sekine; Katsuaki Natori; Tetsuya Kai; Yoshio Ozawa
Archive | 2013
Makoto Nagamine; Daisuke Ikeno; Katsuya Nishiyama; Katsuaki Natori; Koji Yamakawa
Archive | 2005
Ichiro Mizushima; Masayuki Tanaka; Katsuaki Natori; Yoshio Ozawa; Seiji Inumiya; Katsuyuki Sekine; Tetsuya Kai
