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Kenji Funatsu

Shin-Etsu Chemical

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Publication

Featured researches published by Kenji Funatsu.

Archive | 2004

Polymer, resist material and patterning processing

Kenji Funatsu; Tsunehiro Nishi; Shigehiro Nagura

Archive | 2012

NEGATIVE PATTERN FORMING PROCESS

Tomohiro Kobayashi; Kazuhiro Katayama; Jun Hatakeyama; Kenji Funatsu; Seiichiro Tachibana

Archive | 2004

Resist polymer, resist composition and patterning process

Takeru Watanabe; Tsunehiro Nishi; Junji Tsuchiya; Kenji Funatsu; Koji Hasegawa

Archive | 2013

RESIST COMPOSITION, PATTERNING PROCESS AND POLYMER

Jun Hatakeyama; Koji Hasegawa; Kenji Funatsu

Archive | 2012

POLYMER, POSITIVE RESIST COMPOSITION, AND PATTERNING PROCESS

Tomohiro Kobayashi; Takayuki Nagasawa; Ryosuke Taniguchi; Youichi Ohsawa; Kenji Funatsu; Seiichiro Tachibana

Archive | 2000

Silylation of hydroxyl group-containing compound

Kenji Funatsu; Tohru Kubota; Mikio Endo

Archive | 2007

RESIST POLYMER, PREPARING METHOD, RESIST COMPOSITION AND PATTERNING PROCESS

Seiichiro Tachibana; Kenji Funatsu; Takeshi Kinsho; Tsunehiro Nishi

Archive | 2018

TETRACARBOXYLIC ACID DIESTER COMPOUND, POLYMER OF POLYIMIDE PRECURSOR AND METHOD FOR PRODUCING SAME, NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, PATTERNING PROCESS, AND METHOD FOR FORMING CURED FILM

Hiroyuki Urano; Katsuya Takemura; Masashi Iio; Koji Hasegawa; Kenji Funatsu

Archive | 2016

POLYMER, RESIST COMPOSITION, AND PATTERN FORMING PROCESS

Jun Hatakeyama; Kenji Funatsu; Teppei Adachi

Archive | 2010

Resist polymer, resist composition and patterning manufacturing process

Takeru Watanabe; Tsunehiro Nishi; Junji Tsuchiya; Kenji Funatsu; Koji Hasegawa

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Collaboration

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Koji Hasegawa

Shin-Etsu Chemical

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Tsunehiro Nishi

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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Seiichiro Tachibana

Shin-Etsu Chemical

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Takeru Watanabe

Shin-Etsu Chemical

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Tomohiro Kobayashi

Shin-Etsu Chemical

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Hiroyuki Urano

Shin-Etsu Chemical

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Katsuya Takemura

Shin-Etsu Chemical

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Kazuhiro Katayama

Shin-Etsu Chemical

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Masashi Iio

Shin-Etsu Chemical

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