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Klaus-Dieter Morhard

Infineon Technologies

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Publication

Featured researches published by Klaus-Dieter Morhard.

Archive | 1999

Trench capacitor used in the production of DRAM storage cells has a conducting contact layer between the substrate and the conducting trench filling in the trench above the insulating collar

Stefan Gernhard; Klaus-Dieter Morhard; Martin Schrems

Archive | 2001

Method for increasing the trench capacitance

Klaus-Dieter Morhard; Irene Sperl; Klaus Penner

Archive | 1998

Contact between a monocrystalline silicon region and a polycrystalline silicon structure and method for producing such a contact

Martin Schrems; Kai Wurster; Klaus-Dieter Morhard; Joachim Hoepfner

Archive | 2002

Method for the formation of contact holes for a number of contact regions for components integrated in a substrate

Ulrike Gruening-Von Schwerin; Wolfgang Gustin; Klaus-Dieter Morhard

Archive | 2001

Process for forming contact holes in contact regions of components integrated in a substrate comprises applying an insulating layer on a substrate with the integrated components, and applying a mask with openings

Von Schwerin Ulrike Gruening; Wolfgang Gustin; Klaus-Dieter Morhard

Archive | 2000

Trench capacitor configuration and method of producing it

Stefan Gernhard; Martin Schrems; Klaus-Dieter Morhard

Archive | 2006

Method of forming a doped portion of a semiconductor and method of forming a transistor

Tobias Mono; Frank Jakubowski; Hermann Sachse; Lars Voelkel; Klaus-Dieter Morhard; Dietmar Henke

Archive | 2002

Semiconductor structure having buried track conductors, and method for generating an electrical contact with buried track conductors

Christoph Ludwig; Klaus-Dieter Morhard; Christoph Kutter

Archive | 2001

Producing contact holes in integrated circuit involves using optical lithography with mask with elongated, slit-shaped openings for producing essentially circular and/or elongated holes

Lothar Bauch; Schwerin Ulricke Gruening-Von; Henning Haffner; Johannes Kowalewski; Dominique Savignac; Klaus-Dieter Morhard; Guido Thielscher; Reiner Trinowitz

Archive | 2005

Method for generating an electrical contact with buried track conductors

Christoph Ludwig; Klaus-Dieter Morhard; Christoph Kutter

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Collaboration

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Christoph Kutter

Infineon Technologies

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Irene Sperl

Infineon Technologies

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Klaus Penner

Infineon Technologies

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Martin Schrems

Infineon Technologies

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Wolfgang Gustin

Infineon Technologies

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Christoph Ludwig

Infineon Technologies

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Mark Hollatz

Infineon Technologies

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Alexander Trueby

Infineon Technologies

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Dietmar Henke

Infineon Technologies

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Dirk Toebben

Infineon Technologies

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