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Dive into the research topics where Kwan-yong Lim is active.

Publication


Featured researches published by Kwan-yong Lim.


international electron devices meeting | 2016

Technology viable DC performance elements for Si/SiGe channel CMOS FinFTT

Gen Tsutsui; Ruqiang Bao; Kwan-yong Lim; Robert R. Robison; Reinaldo A. Vega; Jie Yang; Zuoguang Liu; Miaomiao Wang; Oleg Gluschenkov; Chun Wing Yeung; Koji Watanabe; Steven Bentley; Hiroaki Niimi; Derrick Liu; Huimei Zhou; Shariq Siddiqui; Hoon Kim; Rohit Galatage; Rajasekhar Venigalla; Mark Raymond; Praneet Adusumilli; Shogo Mochizuki; Thamarai S. Devarajan; Bruce Miao; B. Liu; Andrew M. Greene; Jeffrey Shearer; Pietro Montanini; Jay W. Strane; Christopher Prindle

Low Ge content SiGe-based CMOS FinFET is one of the promising technologies [1-2] offering solutions for both high performance and low power applications. In this paper, we established a competitive SiGe-based CMOS FinFET baseline and examined various elements for high performance offering. The performance elements in gate stack, channel doping, contact resistance, and junction have been explored to provide a cumulative 20% / 25% (n/pFET) performance enhancement. These elements provide a viable path towards performance enhancement for future technology nodes.


Archive | 2016

METHODS OF FORMING DIFFUSION BREAKS ON INTEGRATED CIRCUIT PRODUCTS COMPRISED OF FINFET DEVICES AND THE RESULTING PRODUCTS

Ruilong Xie; Min Gyu Sung; Ryan Ryoung-Han Kim; Kwan-yong Lim; Chanro Park


Archive | 2016

Methods of forming vertical transistor devices with self-aligned top source/drain conductive contacts

John H. Zhang; Carl Radens; Steven Bentley; Brian A. Cohen; Kwan-yong Lim


Archive | 2016

Self-aligned gate-first VFETs using a gate spacer recess

John H. Zhang; Kwan-yong Lim; Steven Bentley; Chanro Park


Archive | 2014

RECESSED CHANNEL FIN DEVICE WITH RAISED SOURCE AND DRAIN REGIONS

Kwan-yong Lim; Min Gyu Sung; Jody A. Fronheiser; Christopher Prindle


Archive | 2016

SINGLE AND DOUBLE DIFFUSION BREAKS ON INTEGRATED CIRCUIT PRODUCTS COMPRISED OF FINFET DEVICES

Ruilong Xie; Kwan-yong Lim; Min Gyu Sung; Ryan Ryoung-Han Kim


Archive | 2017

TITANIUM SILICIDE FORMATION IN A NARROW SOURCE-DRAIN CONTACT

Min Gyu Sung; Kwan-yong Lim; Hiroaki Niimi


Archive | 2016

Contact formation for semiconductor device

Ruilong Xie; Andy Wei; William J. Taylor; Ryan Ryoung-Han Kim; Kwan-yong Lim; Chanro Park


Archive | 2016

Methods of forming replacement gate structures and bottom and top source/drain regions on a vertical transistor device

Steven Bentley; John H. Zhang; Kwan-yong Lim; Hiroaki Niimi


Archive | 2016

Methods of forming vertical transistor devices with self-aligned replacement gate structures

John H. Zhang; Carl Radens; Steven Bentley; Brian A. Cohen; Kwan-yong Lim

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