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Semyon L. Kats

Applied Materials

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Publication

Featured researches published by Semyon L. Kats.

Archive | 1997

Electrostatic chuck having improved gas conduits

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard

Archive | 1999

Electrostatic chuck having gas cavity and method

Arnold Kholodenko; Shamouil Shamouilian; You Wang; Wing L. Cheng; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Ananda H. Kumar

Archive | 2007

Substrate support having heat transfer system

Andrew Nguyen; Wing L. Cheng; Hiroji Hanawa; Semyon L. Kats; Kartik Ramaswamy; Yan Ye; Kwok Manus Wong; Daniel J. Hoffman; Tetsuya Ishikawa; Brian Lue

Archive | 2001

Electrostatic chuck bonded to base with a bond layer and method

You Wang; Shamouil Shamouilian; Arnold Kholodenko; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 2002

Electrostatic chuck having composite dielectric layer and method of manufacture

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard

Archive | 2001

Electrostatic chuck having heater and method

You Wang; Shamouil Shamouilian; Arnold Kholodenko; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 2000

Dielectric covered electrostatic chuck

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard

Archive | 2005

Electrostatic chuck having textured contact surface

Jennifer Y. Sun; James Dempster; Semyon L. Kats; Allen Fox

Archive | 1999

Electrostatic chuck having composite base and method

Shamouil Shamouilian; Ananda H. Kumar; Arnold Kholodenko; You Wang; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng

Archive | 2006

Low temperature aerosol deposition of a plasma resistive layer

Jennifer Y. Sun; Elmira Ryabova; Senh Thach; Zhu Xi; Semyon L. Kats

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Arnold Kholodenko

Applied Materials

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Shamouil Shamouilian

Applied Materials

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Alexander M. Veytser

Applied Materials

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Ananda H. Kumar

Applied Materials

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Dennis S. Grimard

Applied Materials

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Kadthala R. Narendrnath

Applied Materials

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Brian Lue

Applied Materials

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Wing L. Cheng

Applied Materials

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You Wang

Applied Materials

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Surinder S. Bedi

Applied Materials

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